www.impedans.com

ANNOUNCEMENTS

Pulsed Plasma Diagnostics Workshop

SECOND ANNOUNCEMENT

Dear Colleagues,

With this 2nd announcement, we would like to invite you to attend the first Pulsed Plasma Diagnostics Workshop (PPDW) and to submit an abstract of a contribution on your current research in this field. The PPDW is organized by Impedans Ltd with the support of the European COST program and will be held from Thursday, Sept 6th – Friday, Sept 7th, 2012 at the “Crowne Plaza Hotel” in Dublin. The conference language is English.

 

Call for Abstracts

Abstracts are invited for poster presentations and should be submitted immediately for consideration by the organizing committee. Abstracts should be one page in length and formatted for A4 paper with 3cm margins all round. The Title, Authors and Affiliations should be centred and the body of the Abstract should be justified. 12 point text, single line spacing should be used throughout. Please leave one blank line between the Title (emboldened) and the Authors list, one blank line between Author list and Affiliations, and one blank line between Affiliations and the main body of the Abstract. An email address for the lead author should be included as part of the affiliation. Submissions should be in .pdf or .doc format. NB: Poster size should be A0 with portrait layout.

The deadline for abstract submission is 18th May 2012.

 

Social Events

Thursday (September 6th) evening is reserved for the conference dinner, which will include traditional Irish entertainment! Friday afternoon is reserved for the poster session and final discussions and includes a wine reception for delegates.

 

Deadlines

Abstract submission: May 18th, 2012

Early payment deadline: May 29th, 2012

Final Announcement: July 3rd, 2012

 

Preliminary Schedule

THURSDAY 6TH SEPTEMBER

TIME

SPEAKER

GENERAL PULSED PLASMA SESSION

9.00

 

**OPENING**

9.15

Gilles Cunge

Time-resolved diagnostics of reactive pulsed plasmas by absorption spectroscopy, modulated beam Mass spectrometry, ion flux probes and RFEA analyzers

10.00

David Gahan

Time averaged and time resoved measurements of ion energy distributions in pulsed plasmas

10.45

 

**COFFEE**

11.15

Richard van de Sanden

Pulsed plasma processing: from controlled pulsed biasing to high power pulsing of plasma sources

12.00

Timo Gans

Visualizing plasma dynamics and chemical kinetics by multi-scale simulation aided nanosecond imaging

12.45

 

**LUNCH**

14.00

Mike Hopkins

Pulsed plasma diagnostics using RF biased probes

14.45

Uwe Czarnetski

Physical Processes in the Afterglow of Pulsed Low-Pressure Discharges in Argon

15.30

 

**COFFEE**

16.00

Jakob Barz

Measurements and modeling of kinetics in pulsed plasmas

16.45

Stephen Daniels

Parameter estimation in pulsed plasma discharges

18.00

 

**CONFERENCE DINNER**

FRIDAY 7TH SEPTEMBER

 

TIME

SPEAKER

COST MP0804 HIPIMS SESSION

9.00

Arutiun P. Ehiasarian

Plasma Diagnostics Challenges in the High Power Impulse Magnetron Sputtering Environment

9.45

Vitezslav Stranak

Time-resolved diagnostic of assisted High Power Impulse Magnetron Sputtering discharges in wide range of pressures

10.30

 

**Coffee**

11.00

Carles Corbella

Elementary surface processes during plasma pre-treatment of polymers and during target poisoning in reactive magnetron sputtering

11.45

Ralph Bandorf

Investigation of HIPIMS Discharges

12.30

 

**Lunch**

13.30

 

Poster session

15.00

 

Discussion & Workshop end

 

Registration Fees

Regular (before May 29th, 2012): €250

Student (before May 29th, 2012): €145

Late (after May 29th, 2012): €100 supplement for all delegates

Conference dinner (optional): €55

The registration fee includes lunch and coffee break refreshments for both days. The accommodation is not included but can be booked directly with the hotel at a discounted rate for all delegates. Please see the workshop website for details. Please note that the numbers of participants is limited, so please register early.

This workshop is supported by the European COST programme under action group COST MP0804.

 

 

 

FIRST ANNOUNCEMENT


Scope and purpose of this event

Pulsed plasma discharges are used for a variety of applications in modern industry. Magnetron sputtering and HiPIMS discharges, used for depositing layers, generally use pulsed direct current (pDC) excitation of the target and/or substrate to generate the plasma and control the layer properties. Operating frequencies range from 100's Hz to 100's kHz, typically. Recently, there has been a move towards pulsed radio-frequency (pRF) discharge operation by the etching community where the rf driving frequency is pulsed in the 10’s kHz range. In these devices (inductively coupled (ICP) reactors, for example) the source and/or bias frequency are pulsed independently or synchronously to provide better control over the ion energy and etch properties. There are many other examples and uses of pulsed plasmas in the wider community also. The purpose of this workshop is to gather a team of leading experts from the various pulsed plasma fields to share their knowledge and expertise in the art of pulsed plasma diagnostics. This will provide a unique opportunity for plasma physicists from different fields to interact and learn about diagnostic techniques that may now be applicable to their own research. 

Keynote speakers

The workshop lectures will be presented by invited speakers who are world leading experts in their respective fields. Invited speakers include:

Uwe Czarnetski (Ruhr-University Bochum)
Vitezslav Stranak (University of Greifswald)
Richard van de Sanden (FOM Institute for Plasma Physics Rijnhuizen)
Carles Corbella (Ruhr-University Bochum)
Jakob Barz (IGVT – University of Stuttgart)
Gilles Cunge (LTM/CNRS Grenoble)
Mike Hopkins (Impedans Ltd)
Arutiun Ehiasarian (Sheffield Hallam University)
Ralf Bandorf (Fraunhofer Institute)
 
You are here  : Home Announcements