The Octiv Single Frequency VI Probe measures the Voltage, Current, Phase, Impedance, Harmonics, Real Power, Forward Power and Reflected Power delivered to a plasma chamber by an RF source.
Octiv is a single frequency, inline RF VI Probe. The probe contains an RF VI sensor and high speed data acquisition system, utilising an ultra high-speed digital Fourier Transform for high accuracy measurement of fundamental RF voltage, current and phase.
The Octiv probe is housed in a single, compact enclosure, and is easily installed on all high power RF equipment encountered in the laboratory or industrial environment. A USB connection provides power and data access to the sensor. An adaptor kit can be supplied with the probe to enable connection with standard RF equipment.
Measure
Voltage, Current, Phase
Real, Forward, Reflected Power
Impedance
Harmonic Components
Display
Parameters in Meter View
Smith Chart
Harmonic Chart
Time Trend data
The Octiv Software application provides and easy to use interface for controlling the sensor and displaying data. A comprehensive Application Programmers Interface (API) is provided with the sensor to facilitate integration with customer applications and automated environments.
Octiv Sensor installation
Octiv Specifications
Range
Accuracy*
Power
2.5kW
Voltage
± 1%
Frequency
13.56MHz +/- 0.5MHz
Current
Phase
± 1%
± 1°
Voltage
0 - 3000 Vrms
Power
± 2%
Current
0 - 50 Arms
Sample Rate
1-10Hz
Phase
-90° -> + 90°
Sensor Impedance
50 Ohms
Resolution*
Insertion loss
0.05dB
Voltage, Current, Phase
± 0.25V, ± 5.0mA, ± 0.01°
Also Available
Sensor Frequencies in range 400kHz to 160MHz
Size
70 x 70 x 70mm
Weight
400g
* at 13.56MHz, 300W, 50Ohm load, 25°C
NOTE: We supply VI Probes with higher power capabilities and alternative mechanical dimensions.
Please contact us to discuss your specific requirements.
Octiv Pulse RF
The pulsed excitation of low pressure rf discharges is used to obtain greater control over plasma behaviour by controlling the pulse period and duty cycle. Improvements in etch and deposition processes are obtained by choosing appropriate pulsed repetition frequencies.
The Octiv Pulsed RF VI Probe facilitates analysis of the instantaneous impedance and other plasma parameters over a pulse period in a pulsed RF plasma system. The probe is mounted post-match to deliver key electrical measurements with a time resolution of 1uS!
Features and Benefits
Acquire data for fundamental and harmonics of voltage, current, phase and impedance in a pulsed RF plasma
Acquire data over an entire period or a window within the period
Operates in burst mode or modulation modes
Pulsed RF Mode works on a standard Octiv VI Probe, no additional hardware required
1uS resolution to provide high-resolution measurements in real-time
Pulsed RF mode uses level triggering - no external synchronisation required on standard model
In-line signal level monitor to assist with trigger level detection
Integrated API for process control applications
Specifications
The following Pulsed RF specifications apply in addition to the standard Octiv VI Probe specifications:
Trigger Settings
Trigger Level
1% to 100%
Holdoff
0 to 10mS
Scan Settings
Frequency Range
10Hz to 350kHz
Time Resolution
1uS to 10mS
Please contact us to discuss your specific requirements.
View our demo videos to learn more about system installation and measurement capabilities
Octiv VI Probe CW RF Demo
Demonstration of Octiv VI Probe operation. VI Probe installed post match on 13.56MHz source, power cycling
Ocitv VI Probe Pulsed RF Demo
VI Probe measurement of voltage, current, phase, power, impedance of a plasma process with 13.56MHz source pulsed at 10kHz
Octiv Pulse RF
Octiv VI Probe