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Plasma Parameters

Floating potential (Vf)                                           -125V to 50V
Plasma potential (Vp)                                           -100V to 50V
Plasma density (Ne)                                              10⁸ to 10¹² cm^-3
Ion Current Density (Ni)                                          1uA/cm² - 10mA/cm²
Electron temperature (kTe)                                     0.1 to 10eV
Electron energy distribution function (EEDF)

Langmuir Probe

DC, pulsed DC, Microwave plasma                        Standard Probe
RF plasma                                                          Compensated Probe
Length                                                                300mm to 1.4m, other lengths on request
Diameter                                                             2mm to 5mm
Customisation                                                     45° bend, 90° bend, multiple bend
Max. operating temperature:                                 230°C without cooling

ALP System™ Control Unit

Probe Voltage Scan Range                                   -150V to +150V
Probe Current range                                             100pA to 100mA (250mA pulsed)
Communication                                                    USB 2.0
Sampling rate                                                      80MSPS (V,I)
Data Acquisition Resolution                                   4.5mV, 100pA
Time Resolved step resolution
(advanced boxcar mode)                                      25nS
External Trigger                                                   TTL compatible, 1MHz

Application Software

Operating System                                                Windows 2000, XP, Vista

Automated Linear Drive System

Stroke                                                                300mm, 600mm, 900mm, 1.4m, on request
Maximum speed                                                  25mm/sec.
Step resolution                                                    0.025mm
Bakeout Temperature                                           230° C.
Vacuum Leak Rate                                              better than 1 x 10^-10 mbar.l.sec^-1