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Overview   Specifications   More Info   Demo

View our demo videos to learn more about system installation and measurement capabilities

ALP System Langmuir Probe RF 13.56MHz CCP demo

View the ALP System RF Langmuir Probe installed in a CCP chamber running 13.56MHz source. Argon plasma, 100sccm

ALP System Langmuir Probe Tip Cleaning Demo

Using electron bombardment to clean a Langmuir Probe tip in an Argon plasma. Manual and automatic probe tip cleaning modes are supported by the ALP System software.

Overview   Specifications   More Info   Demo