www.impedans.com

Octiv™

The Octiv Single Frequency VI Probe measures the Voltage, Current, Phase, Impedance, Harmonics, Real Power, Forward Power and Reflected Power delivered to a plasma chamber by an RF source.  

Octiv is a single frequency, inline RF VI Probe. The probe contains an RF VI sensor and high speed data acquisition system, utilising an ultra high-speed digital Fourier Transform for high accuracy measurement of fundamental RF voltage, current and phase.

The Octiv probe is housed in a single, compact enclosure, and is easily installed on all high power RF equipment encountered in the laboratory or industrial environment. A USB connection provides power and data access to the sensor. An adaptor kit can be supplied with the probe to enable connection with standard RF equipment.

Measure

• Voltage, Current, Phase
• Real, Forward, Reflected Power
• Impedance
• Harmonic Components

Display

• Parameters in Meter View
• Smith Chart
• Harmonic Chart
• Time Trend data

The Octiv Software application provides and easy to use interface for controlling the sensor and displaying data. A comprehensive Application Programmers Interface (API) is provided with the sensor to facilitate integration with customer applications and automated environments.

                                             Octiv Sensor installation