Plasma Diagnostics
The Impedans Automated Langmuir Probe (ALP) System provides a simple and effective diagnostic for measuring plasma
parameters in low-pressure discharges.
The Impedans ALP System™ can provide the following primary plasma parameters:
- Floating potential, Vf
- Plasma potential, Vp
- Electron density, Ne
- Ion density, Ni
- Electron temperature, kTe
- Electron energy distribution function (EEDF)
among others
Easy To Use – Complete Control
The objective of any probe system design is that the system can be operated by an inexperienced operator and give
reliable results. Impedans support this with a system which is easy to operate and automatically provides the required
analysis results. An API interface for the ALP System™ is provided for those users who wish to integrate the
ALP System™ with existing equipment and software. Software Application source code is provided under the GPL
licence model for those users who prefer to implement their own analysis and control routines.
We provide the tools, the data is yours!
Probe Cleaning
An automated probe tip cleaning feature is provided as standard to facilitate the cleaning of the probe tip after
prolonged use.
Probe Geometry
The diameter of the probe tip is typically 0.4 mm, and the probe holder should be as small as practical < 7mm
at the inductors.The probe length is typically 10 mm and is designed to prevent any increase in probe collection area by
a sputtered conductive layer.
The ALP System™ is designed to meet the requirement of accurate probe measurement. The team at Impedans
will be glad to help out with design issues and can provide probes for many applications. Our analysis routines provide
the latest examples of best practice in probe measurement.
Click here to request additional technical and application information on the Impedans ALP System™.
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