Overview
The Semion™ System is a retarding field energy analyzer (RFEA) system for use on grounded, DC, or RF biased
electrodes. Ion Energy Distributions can be measured over a wide range of RF bias conditions applied to the electrode.
Energy Resolution of at least 1eV is possible. Filters with high input impedance prevent disturbance of the electrode bias,
and high attenuation at the output prevents distortion of the RFEA measurements.
Applications
The Semion™ System finds many applications in research and industry. Beam quality can be monitored in
sputtering systems, and bimodal ion energy distributions may be observed in RF biased systems. Time resolved
measurements for pulsed DC applications are possible by synchronising the Semion™ acquisition system with the
source generator.
Installation
The RFEA is compact and does not require modification of the electrode during installation. The sensor sits
on the electrode surface in place of a substrate. Sensor cables are fed through the chamber side port via a
feed-through assembly. Electrical connections are carried to the Semion™ acquisition system from the chamber
flange connections. Customized substrate holders can be supplied to support installation in etch and deposition/sputtering chambers.
New Feature!!
Semion™ has been updated to support Time-Resolved measurements of Pulsed Plasmas
Check it out
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