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View our demo videos to learn more about system installation and measurement capabilities

Semion RFEA Probe measurements during RF Bias Power Cycle

Demonstration of the effect of RF bias power cycling on the ion energy distribution and ion flux arriving at the substrate surface in an Argon plasma.

Semion RFEA Probe measurements during RF Bias Frequency Sweep

Semion Retarding Field Energy Analyzer installed on CCP chamber. 13.56MHz Source. RF Bias swept from 5MHz to 1MHz in 1MHz steps to demonstrate effect of RF bias frequency on Ion Energy Distribution at the substrate surface in an Argon plasma

Semion Software Demo

Uploading a Semion data file for review.

Overview   Specifications   More Info   Demo