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Semion - Next Generation Ion Energy Measurement & Analysis

Impedans has released the following Semion variants to meet the demands of new research and industrial applications.

Semion pDCTime Resolved IEDF

The Semion pDC system measures supports high-resolution ion energy measurements with a time-resolution of 44nS in the range 0 to 840eV and beyond.

  

  

  

  

Semion HV-2500

The Semion HV-2500 system measures ion energy ranges from 0eV to 2500eV, ideal for industrial grade processes.

Button Probe™

The Semion Button Probe™ is a compact retarding field analyzer which can be serviced by the customer. In the event of the RFEA probe becoming coated or etched away, the user can easily replace the Button Probe™ to support continuous Semion system operation.

Semion Button Probe

 

  

   

Semion Beam

Ion beam energy and current density profiles can be measured with the Semion Beam system up to 1000eV and more. Static, Z-axis and multi-axis systems are available.

DC Bias module

Upgrade your Semion system to automatically measure DC bias. With an additional DC bias measurement module, Semion will monitor and configure the ion energy measurements to report absolute ion energy in real time. Suitable for all applications.

Contact Impedans for more information on any of these systems.

 

 
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