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System Specifications

Ion Energy Range                                    0 to 800eV *

Ion Current                                              2mA DC max.
Ion flux                                                    0.1 - 20mA/cm²

Time Resolved frequency range                 1kHz to 500 kHz

IEDF resolution                                        +/- 1eV nominal

RFEA Probe - View All

Probe Diameter                                       60mm
Holder diameter                                       70mm, 100mm (4"), 300mm (12") as standard, other dimensions on request
Holder thickness                                      5mm

Mounting                                                Mounted flush with holder

Probe Enclosure Material                         Aluminium, anodized aluminium, stainless steel, Al₂O₃, or custom to order

Probe holder material                               Aluminium, anodized aluminium, stainless steel, Al₂O₃, or custom to order

Holder to Chamber wall cable length           500mm standard, or custom length to order

Feed-through Assembly

Flange type                                             KF40 standard, CF40 or other to order

Control Unit Electronics

Voltage Range                                        -600V to +600V (suppression voltage)

                                                             -420V to +420V (grid voltages)

Current range                                          100pA to 2.4mA

Connectivity                                            USB 2.0

Application Software

Operating System                                   Windows 2000/XP/Vista/Windows 7 compatible

* dependent on DC Bias

Overview   Specifications   More Info   Demo