Determination of ion and neutral deposition rates using a quartz crystal microbalance and a gridded energy analyzer Read More »
Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection Read More »
Ion energy and angular distributions measured in a planar Ar/O2 ICP using the Semion RFEA system Read More »
Investigation of ion ejection from a mini-helicon thruster using a Semion retarding field energy analyzer Read More »
Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs) Read More »
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