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Application Notes Blog Post Langmuir Probe Model Validation Process Performance Semion 2500 V4

Study of SiO2 sputter etch rate in RF-Biased ICP discharge.

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Analysis of 13.56 MHz and 40 MHz capacitively coupled nitrogen plasmas

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Application Notes Blog Post Fundamental Research Langmuir Probe

Langmuir probe used in a lunar dust application to measure the electron density and energy distribution

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Application Notes Blog Post Langmuir Probe Process Performance Semion 2500 V4 Semion 3KV Semion pDC

Ion energy distribution measurements in RF and pulsed DC plasma discharges

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Application Notes Blog Post Langmuir Probe Tool Characterization

Investigation of the performances of the microwave plasma source ‘Aura-wave’ by Impedans Langmuir Probe System

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Application Notes Langmuir Probe Tool Characterization

Design and characterization of a plasma chamber for improved radial and axial film uniformity using Impedans’ Langmuir probe system

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Application Notes Blog Post Fundamental Research Langmuir Probe

Evolution of electronegativity during the E to H transition in RF inductively coupled plasma using Impedans’ Langmuir Probe System

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Application Notes Blog Post Langmuir Probe Tool Characterization

Analysis of electron properties of an emissive cathode using Impedans’ Langmuir probe system

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Application Notes Blog Post Fundamental Research Langmuir Probe

A prospective microwave plasma source for in situ spaceflight applications characterized using Impedans’ Langmuir probe system

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Application Notes Blog Post Langmuir Probe Tool Characterization

Characterization of a DC, CO 2-H2 Plasma using Impedans’ Langmuir Probe System

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Application Notes Blog Post Fundamental Research Langmuir Probe

Experimental investigations on time resolved characteristics of pulsed inductively coupled O2 /Ar plasmas using Impedans Langmuir Probe.

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Application Notes Blog Post Fundamental Research Langmuir Probe Octiv Poly 2.0 Tool Characterization

Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges