Categories Application Notes Applications Fundamental Research Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 Process Performance Plasma Atomic Layer Etching of SiO2 and Si3N4 with Low Global Warming C4H3F7O Isomers Post author By nadia lobo Post date November 1, 2023
Categories Application Notes Applications Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 RF Match unit Characterization RF Matching Network Characterization Post author By Sean Mulcahy Post date March 6, 2023
Categories Application Notes Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 Semion 2500 V4 Tool Characterization Inductively coupled array (INCA) discharge using Impedans’ Semion RFEA System and Octiv VI Probe Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Fundamental Research Langmuir Probe Octiv Poly 2.0 Tool Characterization Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Moduli RF Spectrometer Octiv Poly 2.0 Octiv Suite 2.0 Process End Point Detection Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Octiv Poly 2.0 Investigation of the deposition rate of organophosphate thin films using Octiv VI Probe. Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Poly 2.0 virtual metrology Octiv VI probe used to measure the RF characteristics of a commercial CCP reactor Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Poly 2.0 Tool Characterization Study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Langmuir Probe Octiv Poly 2.0 virtual metrology Correlation between plasma parameters and Impedans Octiv VI probe measurements using Regression Analysis Post author By Sean Mulcahy Post date September 23, 2022
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