Categories
Application Notes Process Performance Vertex

Ion angular distribution measurement with a planar retarding field analyzer

Categories
Application Notes Process Performance Vertex

Ion energy and ion flux measurements through high-aspect ratio holes using the Vertex system

Categories
Fundamental Research Process Performance Process Transfer Quantum Semion 2500 Semion 2500 V4 Semion 3KV Semion pDC Tool Characterization Vertex

Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs)