Langmuir Probe Specifications

Measuring Parameters

Floating Potential -145V to 145V
Plasma Potential -100V to 145V
Plasma Density 10⁶ to 3x10¹³cm⁻³
Ion Current Density 1µA/cm² to 300mA/cm²
Electron Temperature 0.1 to 15eV
Electron Energy Distribution Function 0 to 100eV

Langmuir Probe Specifications

Plasma Power Source DC, RF, Microwave, Continuous, Pulsed Plasma
RF Plasma Broadband Probe 2MHz to 100MHz
Probe Length 300mm to 1400mm (Custom Available)
Probe Diameter 10mm (Custom Available)
Probe Tip Length 10mm (Custom Available)
Probe Tip Diameter 0.4mm (Custom Available)
Probe Tip Material W, Ta, Ni, Pt. (Custom Available)
Probe Customisation 90°, 45° Bend (Custom Available)
Maximum Operating Temperature 230°C (Custom up to 1200°C)

Electronics Control Unit

Probe Voltage Scan Range -150V to +150V
Current Range 15nA to 150mA or 1.5µA to 1A for high current densities
Communication USB 2.0
Sampling Rate 80 MSPS (V, I)
Data Acquisition Resolution 4.5mV, 4.5nA
Time Resolved Step Resolution 12.5nS
External Trigger TTL Compatible 10Hz to 1MHz

Application Software

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8

Operating Parameters

Pressure (Pascal) 0 to 1,000Pa
Pressure (Torr) | Single Probe 0 to 10Torr
Pressure (Torr) | Double Probe 0 to 760Torr
Gas Temperature 20º to 230º
Density 10⁴cm⁻³ to 10¹⁴cm⁻³
Gas Reactivity Inert to Highly Reactive
Power Frequency DC (0kHz) • pDC (0 to 350kHz) • MF (0 to 1MHz) • RF (1MHz to 100MHz) • Microwave (1GHz to 3 GHz)