Langmuir Spatial Probe Features

Langmuir Probe Automated Electronics and Software

Electronics UnitThe user-friendly electronics and software takes accurate and reliable measurements with a speed not seen on any other commercial Langmuir Probe. Using an intelligent pre-scan feature, the optimal plasma parameter measurements are performed easily and repeatedly.

Langmuir Probe Tip Cleaning

An automated probe tip cleaning feature is provided as standard to facilitate the cleaning of the probe tip. This is especially useful in deposition plasma. Both automated and manual cleaning procedures are supported by the Single Langmuir Probe systems application software.

Langmuir Probe Replaceable Head

Langmuir Single and Double Probe Heads are easily replaced with the “Easy-Fit” probe tip holder design. Probe tip material is tungsten as standard, with molybdenum, platinum and invar available. Custom probe lengths, diameters, materials, and shapes can be supplied on request and easily updated in the software analysis.

Langmuir Probe Shaft

Probe shaft material is ceramic as standard but custom materials are available on request. Custom probe lengths, diameters and shapes can be supplied on request and easily updated in the software analysis.

Time-Resolved Measurements

A high-speed mode is available to support high resolution time-resolved measurements with a time-step resolution of 12.5ns for pulsed and low frequency applications. Trigger frequencies up to 1MHz are supported, and a built-in programmable delay allows gating of the probe measurements.

Time Averaged Measurements

In applications where high speed resolution is not required averaging the measurement over a number of data points can be used to significantly reduce the noise.

External Trigger

Integrated in the Langmuir Probe System is an external trigger TTL compatible 10Hz to 1MHz

DC Compensation

A novel pre-scan feature eliminates the need for a DC compensation electrode. Voltage shifts in the IV characteristic are monitored at various probe current drains. The plasma to ground resistance is determined and the appropriate correction is applied.

RF Compensation

The Langmuir probe shaft is constructed from metal, coated with a fine layer of ceramic to maximize the coupling of the probe tip to the plasma and eliminate the need for a compensation electrode.