Octiv Poly Theory

Technical note

Octiv VI Probe - Theory of Operation

Abstract

The Octiv VI probe is an advanced RF voltage and current sensor, which can provide real-time information on complex loads. Real-time information the Octiv provides includes voltage, current, phase, power and impedance on all harmonics of a chosen frequency simultaneously, as well as transmission line parameters such as forward power, reflected power, standing wave ratio (SWR) and reflection coefficient. The Octiv sensor was designed to meet the need for post-match voltage and current measurements in RF excited plasma processes.

OC03: Octiv VI Probe - Theory of Operation

OCTIV - Standards of Calibration

Abstract

High power radio-frequency (RF) voltage and current sensors need to be accurately calibrated to a traceable standard. Calibrating to high accuracy can be the most challenging aspect of high power, voltage-current sensor manufacture. This is due to the many sources of error in any calibration process. If the calibration is performed accurately and correctly, then most errors can be characterized and removed.

OC04: Octiv VI Technology - Standards of Calibration

OCTIV - Industrial Communication Protocols

Abstract

In this technical note, communication via industrial protocols such as EtherCat and Ethernet/IP are described. The Octiv VI probe is an advanced and versatile radio-frequency (RF) voltage and current sensor. It can be used in a variety of installation environments and has a wide range of applications. It sees widespread deployment on RF processing equipment used in the semiconductor (and related industries) and in the medical market. For research and development (R&D) activities, the Octiv application software supplied with the product is sufficient for data management. For industrial applications, customers want to process and store data in their own systems and therefore the flexibility to transmit the Octiv data using a range of protocols is critical.

OC05: Octiv VI Technology - Industrial Communication Protocols