
The Octiv Suite is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1 micro second time resolution. It can reconstruct the RF wave-form from complex frequency spectra simultaneously and in plasma applications measure ion flux at the substrate position
RF Parameters Measured:
Voltage (1μs Time Resolution) • Current (1μs Time Resolution) • Phase (1μs Time Resolution) • Impedance (1μs Time Resolution) • Harmonics (1μs Time Resolution) • Ion Flux