Plato Spatial Probe Applications

The Plato Spatial Probe used in Dusty Plasma applications
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The Plato Spatial Probe used in Plasma Etching applications
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The Plato Spatial Probe used in HiPIMS Plasma applications

Characterization of HiPIMS plasma via process compatible measurement probe

Abstract

This study looks at the characterization of a HiPIMS plasma using a process compatible plasma measurement probe which can be used in situations which require measurements at a fast time resolution, where in some cases the application may be depositing insulating layers.

PP01: Characterization of HiPIMS plasma via process compatible measurement probe

The Plato Spatial Probe used in PECVD applications
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The Plato Spatial Probe used in Space Plasma applications
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The Plato Spatial Probe used in Plasma Sputtering applications
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