The Vertex Retarding Field Energy Analyser (RFEA) system measures the Ion flux and Ion energy distribution function (IEDF) incident on a surface in real time using an imitation substrate with replaceable, integrated sensors. The Vertex Multi sensor system can have up to 13 sensing elements distributed around the imitation substrate, primarily to investigate the uniformity of the ion energy and ion flux at the substrate in industrial plasma applications. The Vertex system can also measure these parameters for a range of configurable Aspect Ratios (ARs) ranging from 0.5 to 20, with a resolution of 0.5, to understand their influence on deep trench etching. A variety of replaceable sensing elements are available with different sensitivities for compatibility with a wide range of plasma densities and discharge pressures.
The Vertex Retarding Field Energy Analyser (RFEA), electronics box is calibrated accurately for voltages ranging from -2000V to +2000V and currents ranging from 100 pA to 60 mA.
Model Types | Length | Description |
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02-0459-01 |
Semion Electronics Unit |
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The vacuum feed-through transmits electrical signals by connecting the Electronics box from outside the vacuum chamber to the Semion sensor inside the vacuum chamber.
Model Number | Product Name | Description |
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05-0456-01 |
Semion Multi Feedthrough |
Flange Type CF40 (custom available) |
02-0545-01 |
Semion Multi Time Resolved Feedthrough |
Flange Type CF40 (custom available) |
The Button probes of the sensor are designed to be disposable. Once the measurements start to drift, one can simply replace the sensor and continue measurements.
Model Type | Button Type | Description |
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02-0007-03 |
Low Density |
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02-0333-01 |
Standard Density |
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02-0336-01 |
High Density |
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The main purpose of the sensor holder is to hold the replaceable Button Probe sensors. It can withstand temperatures up to 150<sup>o</sup>C without the need for cooling.
Model Number | Product Name | Description |
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02-0390-01 |
50 mm Single Holder |
Single holders available from 50 mm to 450 mm |
02-0399-01 |
70 mm Single Holder |
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02-0423-01 |
150 mm Multi Holder |
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02-0435-01 |
200 mm Multi Holder |
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02-0447-01 |
300 mm Multi Holder |
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02-0450-01 |
450 mm Multi holder |
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Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you