Button Probes


The Button Probes of the sensor are designed to be replaceable in the field. Lifetime is typically 10 to 100 hours of plasma exposure, depending on chamber conditions. For use in deposition systems the sensing element will survive 10 microns of deposition before needing to be replaced.

High Pressure Buttons, which extend the maximum pressure range to 1.5 Torr, are available upon request.

Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.


Are you planning to do a plasma measurement project soon with your Impedans Semion System? Then you don’t want to run out of Button Probes in the middle of the experiment. Check your stock levels today and fill the form below to place an order.

Did you know you can also book your Semion System in for an inspection? Fill the form below.

If you would like to discuss the performance of your Impedans instruments or if you have any other RF Plasma measurement requirements, please book a call with one of our RF Experts here or fill the form below:


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