Visit us at Booth C1519 at Semicon Europa 2022

 

Dr Chanel Linnane (European Technical Consultant) and Sean Knott (Support Team Manager) will be delighted to answer your questions on how to characterize your plasma processes and achieve high process yield in real-time using a range of Impedans specialized solutions. 

 

Book a 30-minute meeting with Dr Chanel or Sean to meet at the exhibition (Booth C1519). CLICK HERE!!

 

Octiv VI Probe – RF Power and Impedance Measurements

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Chipmakers

The global semiconductor market is projected to grow from $573.44 billion in 2022 to $ 1,380.79 billion by 2029, at a CAGR of 12.2% in forecast period, 2022-2029.  Growing demand for the semiconductor chips used for various electronic products is expected to enhance semiconductor manufacturing industry output during the forecast period.

Impedans believes that our sensor technology can enable the technologies fuelling this growth, by giving visibility to the performance of the RF network and of the plasma.

Below notes highlight research using the Octiv VI and RFEA probes for characterization and optimization of next generation plasma processes used for chip manufacturing.

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RF Subsystems

There are three key performance indicators for the matching network; the match impedance range, the match quality and the match efficiency including the internal resistance. The Octiv VI probe is the ideal product for characterizing the matching network in terms of these three parameters. These in-line sensors are used to study the electrical characteristics of the resulting plasma.

This resource here showcases time-resolved measurements of voltage, current, phase and impedance along with the benefits of different RF frequencies.

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