Substrate Ion Neutral Deposition

Substrate Plasma Ion Neutral DepositionIn deposition systems, measurement of the ion-neutral ratio, deposition rate and ion interactions enables rapid process development.

Related Products

Quantum Single Sensor | Deposition Rate & Ion Energy Analysis

The Quantum is a unique instrument to measure the ratio of ions to neutrals hitting a surface inside a plasma reactor.

Plasma Parameters Measured:
Ion Neutral Fraction • Deposition Rate • Ion Energy • Ion Flux • Bias Voltage

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