Sub-microsecond Time Resolved Measurements

 

Semion Plasma ChamberWe have summarised multiple research papers outlining precision plasma measurement of the time dependence of the ion energy distribution function (IEDF) arriving at any surface in a plasma chamber.

– Inductively Coupled Plasma

– Pulsed Magnetron Sputtering

– HiPIMS

– Pulsed Laser Produced Plasma

 

 

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