We have summarised multiple research papers outlining precision plasma measurement of the time dependence of the ion energy distribution function (IEDF) arriving at any surface in a plasma chamber.
– Inductively Coupled Plasma
– Pulsed Magnetron Sputtering
– HiPIMS
– Pulsed Laser Produced Plasma
Tell us where to send your free copy:
To request a quote from our team please complete the form below: