Measure the ion energies and ion flux impacting on your substrate with our RFEAs - rapidly characterize your plasma chamber under different power, pressure, frequency and gas flow conditions.
Our high performance Octiv VI probe can measure RF power with 1% accuracy, as well as measure impedance and RF harmonics to get a direct view of your plasma.
Measure the fundamental plasma parameters such as the ion density, electron temperature and plasma potential with our state-of-the-art Langmuir Probes
Download the latest software or review our research publications using these plasma measurement instruments
The Alfven is designed to detect arcing in RF plasmas with 1 microsecond resolution.
The Langmuir Spatial can map out the ion density with 1 mm resolution across your plasma chamber, rapidly mapping uniformity under different process conditions
The Octiv Mono can be used to characterize the power efficiency and impedance range of match boxes.
The Quantum RFEA is a hybrid between an ion energy analyzer and quartz crystal microbalance, enabling it to directly measure the ion/neutral ratio impacting a substrate surface. This is one of the key parameters for transferring thin film processes between different tools.
Learn more about arc detection
Read more about the Langmuir Spatial
Learn more about Match Box Characterization
Learn more about the Quantum RFEA
Intelligent Sensors for RF & Plasma Processing
Impedans provide you with intelligent sensing platforms for radio-frequency (RF) and plasma process monitoring. Our products find applications in fundamental research, process development, tool design, process control and fault detection and classification (FDC). We serve a wide range of industries, due to the ubiquitous nature of RF and plasma processing, such as semiconductor, vacuum coating, medical device, hard disk and aerospace among many others.
“Impedans provides unique products, timely support, and always welcome customer’s feedback to further improve their product. It is a delight to work with Impedans’ development team”
“Impedans have been superb. Their customer service is great. The guys there respond very quickly”
“I would recommend Impedans to anyone seeking plasma measurement systems”
“Impedans are a pleasure to work with. They are friendly, accommodating and patient”
“The Semion system together with Impedans’ friendly and immediate customer service – an effective team for plasma analysis”
“Impedans provide an excellent product and their customer service is great”
“Impedans are a pleasure to work with. The excellent customer service makes a real difference to me”
“Impedans provide exciting instruments to measure plasma. I very much look forward to their product updates.”
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you