Plasma Measurement

Understanding and enabling the future

Impedans Ltd is a leading provider of innovative solutions in the field of plasma technology. With a focus on precision, accuracy, and quality, the company has established itself as a trusted partner for customers across a range of industries, including semiconductor manufacturing, research and development. With a team of experienced scientists, engineers, and technicians, Impedans is dedicated to delivering cutting-edge technology and unparalleled customer support to help drive progress and discovery in the world of plasma science.

Markets Served


Our sensors help advance our understanding of complex plasma systems in university plasma physics labs worldwide

Research Institutes

Our technology helps research institutes create innovative solutions in many fields of research

Sub-system Suppliers

Sub-system suppliers apply our technology to help deliver reliable accurate subcomponents to equipment makers.

Equipment Makers

Plasma equipment makers utilize our sensors in their development and field support teams but also often integrate our sensors on their tools.

Semiconductor Manufacturers

Our sensors are used globally by semiconductor device manufacturers for process development, live process monitoring and equipment maintenance.

Other Industries

Plasma is used by vacuum coating, solar, aerospace, military, medical and many other industries and our solutions help them to achieve their goals


Fundamental Research

Impedans sensors are widely utilized in plasma physics research to accurately measure and analyze plasma and RF properties.

Equipment Development

Impedans sensors play a crucial role in the development of modern equipment by providing precise measurements of plasma and RF properties and allowing for real-time monitoring and optimization

Process Development

Our sensors are valuable tools in plasma process development, allowing real-time monitoring of the plasma and helping optimize the conditions for specific applications

Calibration Standard

Impedans technology is widely used as a calibration and verification standard for RF, providing a precise and reliable method for measuring and comparing RF properties.

Process Monitoring

Our sensors are widely used for process monitoring in various industries, providing precise and real-time measurements of plasma properties and enabling effective control and optimization

Maintenance & Repair

We provide essential tools for maintenance and repair providing real-time measurements of plasma and rf properties, allowing technicians to quickly identify and resolve issues with equipment


Bulk Plasma Sensors

Measure the fundamental plasma parameters such as the ion density, electron temperature and plasma potential with our state of the art Langmuir probes

Substrate Level Sensors

Measure the ion energy and ion flux impacting on your substrate with our RFEAs – rapidly characterize your plasma chamber under different power, pressure, frequency and gas flow conditions

RF sensors

Impedans RF Voltage Current Probe - Octiv Poly 2.0

Measure rf power and impedance using our in-line 1% accurate Octiv VI probes for multiple fundamental and harmonic frequencies to get a direct view of your plasma

"I would recommend Impedans to anyone seeking plasma measurement systems"
Prof Richard Van De Sanden

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