Bulk Plasma Measurement
Plato Probe System
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film is deposited on the probe surface. It can measure plasma parameters such as plasma density, ion current density and electron temperature.
Langmuir Probe System
The Langmuir Probe is one of the most common and widely used plasma diagnostics and measures parameters in the bulk of the plasma. The Impedans Langmuir Probe System measures the key plasma parameters such as floating potential, plasma potential, plasma density, ion current density, electron energy distribution function, electron temperature.