Probes

For comprehensive RF pulse monitoring, ARC detection and categorisation

For advanced RF plasma measurement and control applications

For your RF plasma measurement and control applications Harmonic frequency spectrum, ion flux and waveform analysis.

The future of real-time plasma process monitoring

Accurate in-line RF Power and Impedance measurement in CW and pulsed RF applications.

Precision RF Pulse Monitor and Arc Detector Detect and categorise arcing in plasma production tools. Real-time monitor for Pulsed RF generator performance.