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RF Voltage-Current (VI) Probes
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OCTIV Mono 2.0 is a through-line RF Power meter, directional power sensor and impedance analyser. It measures a single fundamental frequency and it has a NIST traceable full scale accuracy of 1%. Its is a non-intrusive, in-line sensor used to verify RF power output from RF generators, match unit impedance range and efficiency and for general purpose power meter measurements. It can be used as a stand-alone instrument with our state of-the-art software suite or integrated directly with any software platform using one of our advanced communication protocols. There is a solution for every RF application including CW, pulsed and frequency tuning.
Compatible with all QC connectors. Capable of being changed in the field, allowing the unit to be moved between chambers with different connectors if desired.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current |
|---|---|---|
02-0231-02 | 12 kW - Connector Dependant | 8.5 kVpk-pk / 9 ARMS |
N-type | 10 kW | 4.2 kVpk-pk / 9 ARMS |
HN-type | 12 kW | 8.5 kVpk-pk / 9 ARMS |
7/16th | 12 kW | 8.5 kVpk-pk / 9 ARMS |
LC | 12 kW | 8.5 kVpk-pk / 9 ARMS |
This Octiv model is designed for post-match use – it can accept custom-made adaptors to the RF bus bars typically used on the output of match boxes.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0311-01 | 12 kW - Connector Dependant | 8.5 kVpk-pk / 80 ARMS - Connector Dependent |
N-type | 10 kW | 4.2 kVpk-pk / 13.3 ARMS |
HN-Type | 12 kW | 8.5 kVpk-pk / 16.4 ARMS |
7/16th | 12 kW | 8.5 kVpk-pk / 17.3 ARMS |
LC | 12 kW | 8.5 kVpk-pk / 21.1 ARMS |
Designed to be compatible with one of the standard match box output connectors, enabling the Octiv to take measurements between the match and the plasma.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0316-01 | 20 kW | 19.8 kVpk-pk / 120 ARMS |
02-0313-01 | 20 kW | 22.6 kVpk-pk / 120 ARMS |
Specialised models designed for High Power applications.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0318-01 | 30 kW | 19.8 kVpk-pk / 120 ARMS |
02-0320-01 | 90 kW | 33.9 kVpk-pk / 500 ARMS |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
Book your recalibration now to ensure 1% true accuracy on your chamber-chamber matching and process repeatability.
