Impedans plays a crucial role in enabling users in academia and industry to conduct fundamental plasma research by providing them with the advanced tools, expertise, and support needed to accurately measure a range of plasma parameters, including ion energy, ion flux, plasma density, electron temperature, deposition rate, aspect ratio, and RF parameters.
Our range of advanced plasma diagnostic tools, such as Langmuir probes, RF voltage/current sensors, and energy analyzers, enable precise measurement of these plasma parameters. Users can also benefit from configured plasma diagnostic solutions tailored to their specific needs, including the application of various algorithms for data analysis.
In addition to offering advanced plasma diagnostic tools, Impedans provides consultancy services to help users optimize their plasma processes and improve the efficiency and quality of their research. This can involve analyzing plasma data and providing insights and recommendations.
To ensure users are fully equipped to use their plasma diagnostic tools effectively, Impedans provides training and support on tool operation, data analysis, and interpretation of results.
The number of charge-contributing electrons per unit volume.
The distribution of the electron energy within the plasma
A ‘statistical’ temperature required to account for the observed energy of electrons
The voltage difference between a plasma and a nearby object
The distribution of energies of ions hitting the surface
The energy of ions per unit area hitting the surface
The increase in film thickness per unit time
The angle of the ions hitting the surface
Voltage, current, power and impedance for fundamental and harmonic rf frequencies and the waveform of the rf
Measures: Electron density, Electron Energy Distribution Function, Electron temperature, Plasma potential, Ion flux
Measures: Ion Energy Distribution, Ion Flux, Ion Angle, Deposition Rate
Measures: Voltage, Current, Phase, Impedance, Power, Waveform