Fundamental Research

Impedans plays a crucial role in enabling users in academia and industry to conduct fundamental plasma research by providing them with the advanced tools, expertise, and support needed to accurately measure a range of plasma parameters, including ion energy, ion flux, plasma density, electron temperature, deposition rate, aspect ratio, and RF parameters.

Our range of advanced plasma diagnostic tools, such as Langmuir probes, RF voltage/current sensors, and energy analyzers, enable precise measurement of these plasma parameters. Users can also benefit from configured plasma diagnostic solutions tailored to their specific needs, including the application of various algorithms for data analysis.

In addition to offering advanced plasma diagnostic tools, Impedans provides consultancy services to help users optimize their plasma processes and improve the efficiency and quality of their research. This can involve analyzing plasma data and providing insights and recommendations.

To ensure users are fully equipped to use their plasma diagnostic tools effectively, Impedans provides training and support on tool operation, data analysis, and interpretation of results.

"Impedans provide exciting instruments to measure plasma. I very much look forward to their product updates."
Dr. Vitezslav Stranak
Institute of Physics | University of Greifswald, Germany

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Electron Density

The number of charge-contributing electrons per unit volume.

Electron Energy Distribution Function

The distribution of the electron energy within the plasma

Electron Temperature

A ‘statistical’ temperature required to account for the observed energy of electrons

Plasma Potential

The voltage difference between a plasma and a nearby object

Ion Energy Distribution

The distribution of energies of ions hitting the surface

Ion Flux

The energy of ions per unit area hitting the surface

Deposition Rate

The increase in film thickness per unit time

Ion Angle

The angle of the ions hitting the surface

RF Parameters

Voltage, current, power and impedance for fundamental and harmonic rf frequencies and the waveform of the rf

Bulk Plasma Sensors

Measures: Electron density, Electron Energy Distribution Function, Electron temperature, Plasma potential, Ion flux

Substrate Level Sensors

Measures: Ion Energy Distribution, Ion Flux, Ion Angle, Deposition Rate

RF Sensors

Impedans RF Voltage Current Probe - Octiv Poly 2.0

Measures: Voltage, Current, Phase, Impedance, Power, Waveform