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Intelligent Sensors for RF & Plasma Processing

Impedans provide you with intelligent sensing platforms for radio-frequency (RF) and plasma process monitoring. Our products find applications in fundamental research, process development, tool design, process control and fault detection and classification (FDC). We serve a wide range of industries, due to the ubiquitous nature of RF and plasma processing, such as semiconductor, vacuum coating, medical device, hard disk and aerospace among many others.