RF Voltage-Current (VI) Probes

Moduli RF Spectrometer

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Moduli RF Event Detector

Moduli RF Spectrometer

The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the harmonics emitted by a plasma from outside the plasma chamber. This is designed for endpoint detection and fault detection on production tools without the need for an in-line sensor in the RF path. It has demonstrated superior performance to optical techniques for low open area endpoint applications. It has also been proven to detect air leaks, wafer displacement and other serious plasma faults. Simply mount the RF antenna either on the viewport, a matchbox fan or through the matchbox wall to start process characterisation.

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Key Features

Choice of 5 arbitrary fundamental frequencies on a single sensor with up to 15 harmonics at each frequency.

Fully compatible with Pulsed RF, with live pulse frequency/duty cycle monitoring and a “time resolved” mode for 1 microsecond resolution pulse snapshots.

Completely non-invasive, no tool modifications are required to add this powerful diagnostic.

Multiple antenna options for different chamber types, including a novel opto-RF sensor to enable harmonic monitoring if a line-of-sight to the plasma is available.

Frequency tracking to ± 10% of the fundamental frequency as standard, customisable for intermodulation frequency monitoring.

USB, Ethernet, EtherCAT and Serial communication protocols with easy-to-use APIs for tool/FDC integration.

Key Benefits

Clean and etch endpoint capabilities with Plasma Impedance Monitoring (PIM) and harmonic spectrum techniques.

Demonstrated to measure etch endpoint for < 1% open area ratio, with significantly sensitivity when compared to multivariate OES endpoint detectors.

Detects wafer placement issues, air leaks, cross-process contamination, and many other common plasma faults.

Gauges overall chamber health, removing the need for unnecessary preventative maintenance actions.

Significant cost benefits through the enablement of fault detection and early intervention.

These advanced applications can be achieved rapidly using the “Impedans Expert” software package and with assistance from Impedans applications team.

Acquisition Unit
RF Antenna

Acquisition Unit

Connect your Impedans MODULI RF Spectrometer directly to your computer using various connector options.

Model Types	Part	Frequency Range
02-0260-01	Acquisition Unit	350 kHz - 500 MHz
02-0255-01	Acquisition Unit	40 kHz - 2 MHz

RF Antenna

Model Types	Part	Frequency Range
02-0494-01	RF Antenna - 1x	40 kHz - 500 MHz
02-0495-01	RF Antenna - 100x	40 kHz - 60 MHz

General Specifications

Antenna Power

5 Vdc, 4.1 mm jack

Antenna Form Factor

[40 mm x 40 mm x 40 mm] & custom

Antenna Communication

2 x SMA coaxial cables

Acquisition Unit Power Requirements

24 Vdc, 0.5 A, 4.1 mm jack

Acquisition Unit Interfaces

Micro USB, Serial, Ethernet

Acquisition Unit Protocols

USB, HTTP Web Service, EtherCAT, Ethernet/IP
Others on request

Acquisition Unit Form Factor

[122 mm x 70 mm x 41 mm]

Connectivity (Impedans Software)

USB 2.0, Ethernet

Communication Protocols (Standard)

USB 2.0, HTTP Web Service

Communication Protocols (OEM Options)

EtherCAT, EtherNet/IP, Serial, RS232

Parameter Report Rate (Standard)

Adjustable; USB up to 500 S/s, Ethernet up to 100 S/s

Acquisition Unit Pulse Synchronisation

External sync: TTL input
Internal sync: Software level trigger

Measurement Parameter Specifications

# Fundamental Frequencies (F₀)

Choose 5 from the fundamental frequency range

Fundamental Frequency Range

350 kHz - 240 MHz or 40 kHz - 400 kHz

Harmonic Frequency (FN) Range

350 kHz - 500 MHz or 40 kHz - 2 MHz

# Harmonic Frequencies (F_N)

≤ 15 per fundamental (64 max.), ≤ 32 simultaneously

Output Parameters at each frequency

V & I [UNCALIBRATED], phase, harmonic phase

Pulsed RF Profiling

1 microsecond resolution

In-Pulse Parameter Monitoring

Up to 2 points in the pulse [standard software],
arbitrary number of points using API

Pulsed RF Range

10 Hz to 100 kHz

Extra Features

RF Waveform Reconstruction

V channel range

Arbitrary [adjustable gain]

I channel range

Arbitrary [adjustable gain]

Phase Range and Resolution
[Available only when V & I channel are locked]

±180 degrees with 0.02 degrees resolution

Harmonic Phase Range and Resolution

±180 degrees with 0.02 degrees resolution

Software Screenshots

Harmonic profile for voltage and current (in % scale) as shown in the software.

View

Voltage and Current data along with the Waveform reconstruction.

View

Harmonic profile for voltage and current (in dBc scale) as shown in the software.

View

Applications

Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you

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Moduli RF Spectrometer

Acquisition Unit

RF Antenna

Software Screenshots

All Octiv Applications

Octiv Publications List

RF Spectrometer for End Point Detection