The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the harmonics emitted by a plasma from outside the plasma chamber. This is designed for endpoint detection and fault detection on production tools without the need for an in-line sensor in the RF path. It has demonstrated superior performance to optical techniques for low open area endpoint applications. It has also been proven to detect air leaks, wafer displacement and other serious plasma faults. Simply mount the RF antenna either on the viewport, a matchbox fan or through the matchbox wall to start process characterisation.
Connect your Impedans MODULI RF Spectrometer directly to your computer using various connector options.
Model Types | Part | Frequency Range |
---|---|---|
02-0260-01 |
Acquisition Unit |
350 kHz - 500 MHz |
02-0255-01 |
Acquisition Unit |
40 kHz - 2 MHz |
Model Types | Part | Frequency Range |
---|---|---|
02-0494-01 |
RF Antenna - 1x |
40 kHz - 500 MHz |
02-0495-01 |
RF Antenna - 100x |
40 kHz - 60 MHz |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
Book your recalibration now to ensure 1% true accuracy on your chamber-chamber matching and process repeatability.