The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface. The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress. This allows the plasma parameters such as plasma density, Ion current density and electron temperature to be measured in systems where a standard Langmuir probe would not be suitable, such as plasma enhanced chemical vapour deposition (PECVD) systems. This probe also has a sync function for time resolved measurements, to look at plasma evolution in Pulsed DC and HiPIMS processes with 1 microsecond resolution.
A linear dive can accurately and automatically move the probe without disturbing the vacuum using a bellows system and motor. This can all be automated in the software while also having the ability to collate the data in order to plot the spatial trend of the plasma parameters calculated at each spatial point.
|Model types||Spatial Range (mm)||Minimum Probe Length (mm)|
Electronics control unit for the Plato probe. Connects to a PC via USB cable to operate the probe.
|Model Number||Current Range||Description|
300 μA - 20 mA
Compatible with all Plato Probe shafts and linear drives
Plato probe with a fixed length that has a direct line of sight into the plasma from the vacuum port.
Fixed Probe 10 mm
10 mm OD, rigid, Alumina Shaft (<1m length)
If direct line of sight cannot be achieved then using the Flexible Plato probe this limitation can be overcome. The Flexible Langmuir probe consists of a Feed-through, a user specified flexible length followed by a length of solid shaft that goes until the tips.
Feed-through for flexible shaft models
Feed-through for flexible Plato Probes
Flexible 70 mm Shaft
Rigid tip section with flexible ceramic beaded cable
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