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Impedans Langmuir Probe System
Langmuir Probe System

The Langmuir Probe is one of the most widely used plasma measurement instruments. It is used to measure the characteristics of the bulk plasma region. The Impedans Langmuir Probe System measures the key plasma parameters such as plasma potential, charged particle density (electron & ion) and the electron temperature using the most advanced theoretical models available. Langmuir probe measurements provide the user with fundamental insights into the physical phenomena that govern plasma behaviour. With an 80 MS/s sampling rate, pulse profiling and single shot plasmas can be measured with unrivalled time resolution.

Key Features
Interchangeable single, double, spherical, planar and Mach probe head options.
Time averaged, time trend, synchronised pulse profile and triggered fast-sweep modes.
Automated tip cleaning function using plasma electron bombardment to remove oxides and insulating layers.
Integrated linear drive mechanism available to automatically profile spatial plasma uniformity.
Up to 5 integrated RF compensation filters in the one probe with a DC reference probe as standard.
Compatible with DC, Pulsed DC, RF, Pulsed RF, Microwave and other plasma excitation methods.
There are over 100 publications using this system.
Key Benefits
Multiple, interchangeable probe head types in a single system, lowering the cost of ownership.
State of the art plasma models built into the software for automatic data analysis.
Intuitive and user-friendly interface, with an API for remote control.
Saves time and improves productivity through sophisticated automation features. Batch scripts can be input for automation of measurements.
Robust and durable design to survive in extreme plasma environments.
Custom probe options including right angle elbows and flexible probe shafts to fit any chamber.
Provides measurements for fundamental research, process development and model benchmarking.
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A linear dive can accurately and automatically move the probe without disturbing the vacuum using a bellows system and motor. This can all be automated in the software while also having the ability to collate the data in order to plot the spatial trend of the plasma parameters calculated at each spatial point.

Model Types Spatial Range (mm) Minimum required Probe length (mm)

02-0507-01

150

308

02-0033-04

300

496

02-0034-04

450

689

02-0035-04

600

874

02-0508-01

900

1249

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Electronics control unit for the Langmuir probe. Available with various current ranges to suit the expected plasma density. Compatible with all probe types.

Model Number Current Ranges Description

02-0241-01

1.5 μA - 1 A

-

02-0045-04

15 nA – 150 mA

-

02-0460-01

1.5 nA – 15 mA

-

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Langmuir probe with a fixed length that has a direct line of sight into the plasma from the vacuum port.

Model Types Product Name Description

02-0144-02

Fixed Probe 10 mm

10 mm OD, rigid, Alumina Shaft (<1m length), filters in shaft near tip

02-0463-01

Fixed Probe 6.5 mm

6.5 mm OD, Rigid, ceramic coated stainless steel shaft (<1 m length), RF filters in feed-through

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If direct line of sight cannot be achieved then using the Flexible Langmuir probe this limitation can be overcome. The Flexible Langmuir probe consists of a Feed-through, a user specified flexible length followed by a length of solid shaft that goes until the tips.

Model Number Product Name Description

02-0501-01

Feed-through for flexible shaft models

Feed-through for flexible Langmuir Probes

02-0466-01

Flexible 10 mm Shaft

Rigid tip section with flexible ceramic beaded cable

02-0467-01

Flexible 6.5 mm Shaft

Rigid tip section with flexible ceramic beaded cable

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Model Number Product Name Description

02-0505-01

Tungsten Tips

02-0506-01

Platinum Tip

02-0565-01

Tantalum Tip

05-0662-01

Stainless-Steel Planar Tip

02-0526-01

Platinum Planar Tip

Spherical Tip

05-1080-01

Mach Probe

02-0520-01

Right Angle Adapter

Available as 65 and 130 mm attachments

03-0333-01

Triax cable for Single Probe

Cable with the inner shield shorted to the outer shield.

02-0471-01

Double Probe Tip Holder

02-0470-01

Single Probe with Reference Tip Holder

05-0334-02

Tip Cover

Flexible Planar Tip

Langmuir Probe System Plasma Parameter Ranges
Floating Potential
-145 V to +145 V
Plasma Potential
-100 V to +145 V
Plasma Density
106 to 1013 cm-3
Ion Current Density
1 μA/cm2 to 300 mA/cm2
Electron Temperature
0.1 eV to 15 eV
Electron Energy Probability Function (EEPF)
0 eV to 100 eV
General Specifications
Probe Length
150 mm to 1400 mm
Probe Tip Length
10 mm, Customisable
Probe Tip Diameter
0.4 mm, Customisable
Probe Tip Material Options
W, Ta, Ni, Pt
Max. Operating Temperature
Model 02-1444-02: Air Cooled 230 °C
Model 02-1444-02: No Cooling 125 °C
Model 02-0463-01: 900 °C
Model 02-0501-01: 125 °C
RF Compensation Frequencies
Max. 5
Typical RF Frequency Compensation Options
400 kHz, 2 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz,
60 MHz
Plasma Reactor Types
DC, Pulsed DC, MF, RF, Pulsed RF, Microwave,
Atmospheric Plasmas
Linear Drive Options
150, 300, 450, 600 & 900 mm
Time Resolved Step Resolution
12.5 ns
Air Cooling Inlet
4 mm tube push fit
Max. Compressed Air Pressure
4 Bar
Voltage Scan Range
-150 to +150 V
Sensor Pulse Synchronisation
External sync: TTL input trigger (1 Hz to 1 MHz)

Software Screenshots

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Electron Energy Probability Function (EEPF).
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VI curve and second derivative for a Single Langmuir Probe.
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Electron density as a function of position over a 300mm wafer.
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