Bulk Plasma Measurement

Langmuir Probe System

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The Langmuir Probe is one of the most widely used plasma measurement instruments. It is used to measure the characteristics of the bulk plasma region. The Impedans Langmuir Probe System measures the key plasma parameters such as plasma potential, charged particle density (electron & ion) and the electron temperature using the most advanced theoretical models available. Langmuir probe measurements provide the user with fundamental insights into the physical phenomena that govern plasma behaviour. With an 80 MS/s sampling rate, pulse profiling and single shot plasmas can be measured with unrivalled time resolution.

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Key Features

Interchangeable single, double, spherical, planar and Mach probe head options.

Time averaged, time trend, synchronised pulse profile and triggered fast-sweep modes.

Automated tip cleaning function using plasma electron bombardment to remove oxides and insulating layers.

Integrated linear drive mechanism available to automatically profile spatial plasma uniformity.

Up to 5 integrated RF compensation filters in the one probe with a DC reference probe as standard.

Compatible with DC, Pulsed DC, RF, Pulsed RF, Microwave and other plasma excitation methods.

There are over 100 publications using this system.

Key Benefits

Multiple, interchangeable probe head types in a single system, lowering the cost of ownership.

State of the art plasma models built into the software for automatic data analysis.

Intuitive and user-friendly interface, with an API for remote control.

Saves time and improves productivity through sophisticated automation features. Batch scripts can be input for automation of measurements.

Robust and durable design to survive in extreme plasma environments.

Custom probe options including right angle elbows and flexible probe shafts to fit any chamber.

Provides measurements for fundamental research, process development and model benchmarking.

Linear Drive
Electronics Box
Solid Fixed Length Langmuir Probe
Flexible Langmuir Probe
Adaptors, Probe Tips and Miscellaneous

A linear dive can accurately and automatically move the probe without disturbing the vacuum using a bellows system and motor. This can all be automated in the software while also having the ability to collate the data in order to plot the spatial trend of the plasma parameters calculated at each spatial point.

Model Types	Spatial Range (mm)	Minimum required Probe length (mm)
02-0507-01	150	308
02-0033-04	300	496
02-0034-04	450	689
02-0035-04	600	874
02-0508-01	900	1249

Electronics control unit for the Langmuir probe. Available with various current ranges to suit the expected plasma density. Compatible with all probe types.

Model Number	Current Ranges	Description
02-0241-01	1.5 μA - 1 A	-
02-0045-04	15 nA – 150 mA	-
02-0460-01	1.5 nA – 15 mA	-

Langmuir probe with a fixed length that has a direct line of sight into the plasma from the vacuum port.

Model Types	Product Name	Description
02-0144-02	Fixed Probe 10 mm	10 mm OD, rigid, Alumina Shaft (<1m length), filters in shaft near tip
02-0463-01	Fixed Probe 6.5 mm	6.5 mm OD, Rigid, ceramic coated stainless steel shaft (<1 m length), RF filters in feed-through

If direct line of sight cannot be achieved then using the Flexible Langmuir probe this limitation can be overcome. The Flexible Langmuir probe consists of a Feed-through, a user specified flexible length followed by a length of solid shaft that goes until the tips.

Model Number	Product Name	Description
02-0501-01	Feed-through for flexible shaft models	Feed-through for flexible Langmuir Probes
02-0466-01	Flexible 10 mm Shaft	Rigid tip section with flexible ceramic beaded cable
02-0467-01	Flexible 6.5 mm Shaft	Rigid tip section with flexible ceramic beaded cable

Model Number	Product Name	Description
02-0505-01	Tungsten Tips
02-0506-01	Platinum Tip
02-0565-01	Tantalum Tip
05-0662-01	Stainless-Steel Planar Tip
02-0526-01	Platinum Planar Tip
	Spherical Tip
05-1080-01	Mach Probe
02-0520-01	Right Angle Adapter	Available as 65 and 130 mm attachments
03-0333-01	Triax cable for Single Probe	Cable with the inner shield shorted to the outer shield.
02-0471-01	Double Probe Tip Holder
02-0470-01	Single Probe with Reference Tip Holder
05-0334-02	Tip Cover
	Flexible Planar Tip

Langmuir Probe System Plasma Parameter Ranges

Floating Potential

-145 V to +145 V

Plasma Potential

-100 V to +145 V

Plasma Density

10⁶ to 10¹³ cm^-3

Ion Current Density

1 μA/cm² to 300 mA/cm²

Electron Temperature

0.1 eV to 15 eV

Electron Energy Probability Function (EEPF)

0 eV to 100 eV

General Specifications

Probe Length

150 mm to 1400 mm

Probe Tip Length

10 mm, Customisable

Probe Tip Diameter

0.4 mm, Customisable

Probe Tip Material Options

W, Ta, Ni, Pt

Max. Operating Temperature

Model 02-1444-02: Air Cooled 230 °C
Model 02-1444-02: No Cooling 125 °C
Model 02-0463-01: 900 °C
Model 02-0501-01: 125 °C

RF Compensation Frequencies

Max. 5

Typical RF Frequency Compensation Options

400 kHz, 2 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz,
60 MHz

Plasma Reactor Types

DC, Pulsed DC, MF, RF, Pulsed RF, Microwave,
Atmospheric Plasmas

Linear Drive Options

150, 300, 450, 600 & 900 mm

Time Resolved Step Resolution

12.5 ns

Air Cooling Inlet

4 mm tube push fit

Max. Compressed Air Pressure

4 Bar

Voltage Scan Range

-150 to +150 V

Sensor Pulse Synchronisation

External sync: TTL input trigger (1 Hz to 1 MHz)

Software Screenshots

Electron Energy Probability Function (EEPF).

View

VI curve and second derivative for a Single Langmuir Probe.

View

Electron density as a function of position over a 300mm wafer.

View

Applications

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Langmuir Probe System

Software Screenshots

All Langmuir Probe Applications

Langmuir Probe Publications List

Langmuir Probe Use in Pulsed Plasma