Model Validation

At Impedans, we understand the importance of accurate plasma modeling in a range of industries, from semiconductor manufacturing to fusion research. Our cutting-edge diagnostic tools, such as Langmuir probes and plasma sensors, enable customers to measure key plasma parameters, including plasma density, temperature, and potential. By comparing these measurements to predictions made by their plasma models, customers can validate their models and optimize their processes for maximum efficiency and performance. Our team of experienced engineers and plasma scientists are committed to working closely with customers to ensure they have the tools and support needed to achieve their plasma modeling goals. With Impedans, customers can be confident in the accuracy of their plasma models, leading to better decision-making and improved outcomes.

"I would recommend Impedans to anyone seeking plasma measurement systems"
Prof Richard Van De Sanden

If you work with plasma and don’t see the parameters you are interested in listed here

Click here to CONTACT US

We’ll be happy to have a discussion and see how we can help you!

Electron Density

The number of charge-contributing electrons per unit volume.

Electron Energy Distribution Function

The distribution of the electron energy within the plasma

Electron Temperature

A ‘statistical’ temperature required to account for the observed energy of electrons

Plasma Potential

The voltage difference between a plasma and a nearby object

Ion Energy Distribution

The distribution of energies of ions hitting the surface

Ion Flux

The energy of ions per unit area hitting the surface

Deposition Rate

The increase in film thickness per unit time

Ion Angle

The angle of the ions hitting the surface

RF Parameters

Voltage, current, power and impedance for fundamental and harmonic rf frequencies and the waveform of the rf

Bulk Plasma Sensors

Measures: Electron density, Electron Energy Distribution Function, Electron temperature, Plasma potential, Ion flux

Substrate Level Sensors

Measures: Ion Energy Distribution, Ion Flux, Ion Angle, Deposition Rate

RF Sensors

Impedans RF Voltage Current Probe - Octiv Poly 2.0

Measures: Voltage, Current, Phase, Impedance, Power, Waveform