At Impedans, we understand the importance of accurate plasma modeling in a range of industries, from semiconductor manufacturing to fusion research. Our cutting-edge diagnostic tools, such as Langmuir probes and plasma sensors, enable customers to measure key plasma parameters, including plasma density, temperature, and potential. By comparing these measurements to predictions made by their plasma models, customers can validate their models and optimize their processes for maximum efficiency and performance. Our team of experienced engineers and plasma scientists are committed to working closely with customers to ensure they have the tools and support needed to achieve their plasma modeling goals. With Impedans, customers can be confident in the accuracy of their plasma models, leading to better decision-making and improved outcomes.
The number of charge-contributing electrons per unit volume.
The distribution of the electron energy within the plasma
A ‘statistical’ temperature required to account for the observed energy of electrons
The distribution of energies of ions hitting the surface
The energy of ions per unit area hitting the surface
The increase in film thickness per unit time
The angle of the ions hitting the surface
Voltage, current, power and impedance for fundamental and harmonic rf frequencies and the waveform of the rf
Measures: Electron density, Electron Energy Distribution Function, Electron temperature, Plasma potential, Ion flux
Measures: Ion Energy Distribution, Ion Flux, Ion Angle, Deposition Rate
Measures: Voltage, Current, Phase, Impedance, Power, Waveform