All Products RF Voltage-Current (VI) Probes Alfven | Plasma Arc Detector | Pulsed RF Monitoring
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Alfven | Plasma Arc Detector | Pulsed RF Monitoring

The Alfven 100 is an advanced, all-in-one diagnostic instrument for plasma arc detection and RF pulse monitoring. The Alfven architecture enables real-time processing of RF measurements with one microsecond resolution. It is designed to detect and characterise arcs while simultaneously monitoring every RF pulse to check that each pulse is within a predefined specification. Arcs and misfiring RF pulses can lead to wafer defects, therefore, the Alfven 100 is an essential tool for rapid troubleshooting and 24/7 monitoring.

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Key Features
1 μs resolution for arcs and atypical pulses simultaneously (with adjustable noise filter).
Configurable arc and pulse classification widgets.
Monitors ON-time, pulse frequency and duty cycle of every pulse.
Reports on deviations from user configured acceptance limits.
ON-OFF and multi-level pulsing (up to 3 levels).
Max., min. and average voltage and current reported during pulses to monitor “overshoot”.
“Snapshot” function to view pulse profile at a given time.
Recipe function to instruct the sensor to adjust settings automatically to follow complex, multi-step plasma processes.
Key Benefits
Quickly determine if arcs or atypical pulses are responsible for wafer defects.
Pulse snapshot feature avoids inconvenient directional coupler-to-oscilloscope setup.
Monitor average pulse frequency and duty cycle of each process step with the recipe feature.
Monitor the number of arcs per process, which can lead to undesirable particle creation.
On-board, intelligent data processing – microsecond data reported when requested.
On-board memory to store data during network outage.
Generates summary reports for your process.
  • QC Connector
  • Rod/6 mm Pin
  • B20N
  • EIA
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Standard Alfven form factor with exchangeable Quick-Connect (QC) connectors. Ideal for day-to-day use in a fab for arc monitoring.

 

Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.

Model TypesPower LimitVoltage/Current Limit

02-0260-01

9 kW

8.5 kVpk-pk / 13 ARMS

This Alfven model is designed for post-match use – it can accept customer-made adaptors to the RF bus bars typically used on the output of match boxes.

 

Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.

Model NumberPower LimitVoltage/Current Limit

02-0496-01

12 kW

8.5 kVpk-pk / 80 ARMS

Designed to be compatible with one of the standard match box output connectors, enabling the Alfven to take measurements between the match and the plasma.

 

Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.

Model NumberPower LimitVoltage/Current Limit

02-0498-01

20 kW

19.8 kVpk-pk / 120 ARMS

02-0497-01

20 kW

22.6 kVpk-pk / 120 ARMS

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Specialised models designed for High Power applications.

 

Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.

Model NumberPower LimitVoltage/Current Limit

02-0499-01

30 kW

19.8 kVpk-pk / 120 ARMS

02-0500-01

90 kW

33.9 kVpk-pk / 500 ARMS

Voltage & Current Specifications
Voltage Range (Typical)
0.3 V to 3000 VRMS, custom available
Voltage Resolution
0.1 VRMS
Current Range
2.5 mARMS to 25 ARMS, custom available
Current Resolution
2.5 mARMS
Voltage & Current Accuracy
Uncalibrated
Arc & Pulse Monitoring Specifications
Arc Duration Detection Range
1 μs to 5000 μs
Arc Amplitude Range (vs Moving Average)
1% to 100% change
Arc Categories (customisable)
9 (3 time duration ranges x 3 amplitude ranges)
Pulse Frequency Detection Range
5 Hz to 100 kHz
Pulse Level Monitoring
Upto 3 levels (Ex. Power high, Medium, Off)
Pulse Timing Resolution
1 μs
Pulse Parameters Reported
Pulse frequency, Duty cycle (of each pulse level), Average,
Max & min voltage and Current in each level
Max. Number of Recipe Steps
40 steps
General Specifications
Sensor Characteristic Impedance
50 Ohms as standard
RF Connectors
QC, EIA and custom options
RF Power Range @ 50 Ohms impedance
Standard: 12 kW typical (connector dependent)
High Power: 30 kW & 90 kW
Operating Temperature Range
10oC - 80oC, calibrated versus temperature
Sensor Power Requirements
15-24 V DC, 0.5 A
Communication Interfaces
Micro USB, RJ45 (x2)
Connectivity (Impedans Software)
USB 2.0, Ethernet
Communication Protocols (Standard)
USB 2.0, HTTP Web Service
Communication Protocols (OEM Options)
EtherCAT, EtherNet/IP
Parameter Report Rate
10 Samples/second
Onboard Data Storage
14 hours of average data plus up to 5000 atypical
pulse or arc events

Software Screenshots

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Example from a PECVD chamber with poor seasoning.
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Example of a High - Low – Off multi level pulse.
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Example of Arc Data showing how the length of the arc is defined.
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Applications
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RF Voltage Current Probe - Octiv VI Probe High Power RF Voltage Current Probe - Octiv VI Probe High Power
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Impedans Alfven RF Arc Detector and Pulse Monitor Impedans Alfven RF Arc Detector and Pulse Monitor
Alfven for Pulsed RF plasma
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