The Moduli RF Event Detector is an advanced, all-in-one diagnostic instrument for plasma arc detection and RF pulse monitoring. The Moduli architecture enables real-time processing of RF measurements with one microsecond resolution. It is designed to detect and characterise arcs while simultaneously monitoring every RF pulse to check that each pulse is within a predefined specification. Arcs and misfiring RF pulses can lead to wafer defects, therefore, the Moduli RF Event Detector is an essential tool for rapid troubleshooting and 24/7 monitoring.
Connect your Impedans MODULI RF Spectrometer directly to your computer using various connector options.
Model Types | Part | Frequency Range |
---|---|---|
02-0493-01 |
Acquisition Unit |
350 kHz - 500 MHz |
02-0255-01 |
Acquisition Unit |
40 kHz - 2 MHz |
Model Types | Part | Frequency Range |
---|---|---|
02-0494-01 |
RF Antenna - 1x |
40 kHz - 500 MHz |
02-0495-01 |
RF Antenna - 100x |
40 kHz - 60 MHz |
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