RFEAs have been used for decades to measure IEDs (Ion Energy Distribution) in plasma discharges. Their bulky design and the differential pumping required for the device to operate even at the low pressures encountered in many plasma processes, meant that success was limited.
However, the Impedans RFEA is constructed from process compatible materials and the sensor’s miniature size allows it to be mounted on the substrate or any other surface inside the reactor.
To learn how this design has achieved huge success in measuring the ion energy distribution in our on-demand webinar. The key elements are:
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