All Products RF Voltage-Current (VI) Probes Octiv Poly 2.0
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RF Voltage Current Probe - Octiv Poly 2.0
Octiv Poly 2.0

The Octiv Poly 2.0 VI probe is a multi-frequency in-line RF voltage, current and phase measurement system with network communication (Ethernet Web Service Protocol, EtherNet/IP or EtherCAT available). With 1% true accuracy, chamber-to-chamber matching and process repeatability can be established with confidence. Uniquely convenient form-factors enable retrofitting to match box outputs to facilitate direct plasma monitoring. Issues such as product scrap events, endpoint detection errors and unnecessary preventative maintenance can all be eliminated with this advanced VI probe technology.

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Key Features
Choice of 5 frequencies on a single sensor with up to 15 harmonics at each frequency.
Unrivalled power accuracy into 50 Ω and non-50 Ω load impedances through our advanced calibration methodology (1% true accuracy).
Sensor run-to-run repeatability (<0.1%), enabling a true gauge of plasma process drift.
Live Smith Chart view, with impedance accuracy comparable to offline vector network analysers.
Frequency tracking to ±10% of the fundamental frequency as standard, customisable for intermodulation frequency monitoring.
Superior Pulsed RF capability with live pulse frequency and duty cycle monitoring and “time resolved” mode.
USB, Ethernet, EtherCAT and Serial communication protocols with easy-to-use APIs for integrations.
Key Benefits
Clean and etch endpoint capabilities with Plasma Impedance Monitoring (PIM) and harmonic spectrum techniques.
Demonstrated detection of etch endpoint for <1% open area ratio, with significantly higher sensitivity compared to multivariate OES endpoint detectors.
Detects wafer placement issues, air leaks, cross-process contamination, and many other common plasma faults.
Gauges overall chamber health, removing the need for unnecessary preventative maintenance actions.
Significant cost benefits through the enablement of fault detection and early intervention.
These advanced applications can be achieved rapidly using the “Impedans Expert” software package and with assistance from the Impedans applications team.
  • QC Connector
  • Rod/6mm pin
  • B20N
  • EIA
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Compatible with all QC connectors. Capable of being changed in the field, allowing the unit to be moved between chambers with different connectors if desired.

 

Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.

Model Number Power Limit Voltage/Current Limit

02-0232-02

12 kW - Connector Dependant

8.5 kVpk-pk / 9 ARMS

N-Type

10 kW

8.5 kVpk-pk / 9 ARMS

HN-type

12 kW

8.5 kVpk-pk / 9 ARMS

7/16th

12 kW

8.5 kVpk-pk / 9 ARMS

LC

12 kW

8.5 kVpk-pk / 9 ARMS

This Octiv model is designed for post-match use – it can accept custom-made adaptors to the RF bus bars typically used on the output of match boxes

Model Number Power Limit Voltage/Current Limit

02-0307-01

12 kW - Connector Dependant

8.5 kVpk-pk / 80 ARMS - Connector Dependent

N-Type

10 kW

8.5 kVpk-pk / 13.3 ARMS

HN-Type

12 kW

8.5 kVpk-pk / 16.4 ARMS

7/16th

12 kW

8.5 kVpk-pk / 17.4 ARMS

LC

12 kW

8.5 kVpk-pk / 21.1 ARMS

Designed to be compatible with one of the standard match box output connectors, enabling the Octiv to take measurements between the match and the plasma.

Model Number Power Limit Voltage/Current Limit

02-0308-01

20 kW

19.8 kVpk-pk / 120 ARMS

02-0314-01

20 kW

22.6 kVpk-pk / 120 ARMS

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Specialised models designed for High Power applications.

Model Number Power Limit Voltage/Current Limit

02-0352-01

30 kW

19.8 kVpk-pk / 120 ARMS

02-0306-01

90 kW

33.9 kVpk-pk / 500 ARMS

Power, Voltage & Current Specifications
Power Dynamic Range
> 40 dB
Power Range
See model specifications
Power Resolution
0.25 W
Power Accuracy (95% confidence)
±1%
Voltage Dynamnic Range
80 dB
Voltage Range (Typical)
0.3 VRMS to 3000 VRMS, custom available
Voltage Resolution
0.1 VRMS
Voltage Accuracy (95% confidence)
±1%
Current Dynamic Range
80 dB
Current Range
2.5 mARMS to 20 ARMS, custom available
Current Resolution
2.5 mARMS
Current Accuracy (95% confidence)
±1%
General Specifications
Calibration Standard
NIST traceable [Power, Impedance]
Calibration Cycle
1 year to maintain quoted accuracy
Sensor Characteristic Impedance
50 Ohms as standard
RF Connectors
QC, EIA and custom options
RF Power Range @ 50 Ohms impedance
Standard: 12 kW typical (connector dependent)
High Power: 30 kW & 90 kW
Operating Temperature Range
10oC - 80oC, calibrated versus temperature
Sensor Power Requirements
15-24 V DC, 0.5 A
Communication Interfaces
Micro USB, RJ45 (x2)
Connectivity (Impedans Software)
USB 2.0, Ethernet
Communication Protocols (Standard)
USB 2.0, HTTP Web Service
Communication Protocols (OEM Options)
EtherCAT, EtherNet/IP, Serial, RS232
Parameter Report Rate (Standard)
USB: 2 ms
Ethernet: 100 ms
Sensor Pulse Synchronisation
External sync: TTL input
Internal sync: Software level trigger

Software Screenshots

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Harmonic profile for voltage and current (in % scale) as shown in the software.
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Meter View showing live monitoring of parameters.
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Smith Chart showing the characterisation of a match box.
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Applications
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