The Octiv Poly 2.0 VI probe is a multi-frequency in-line RF voltage, current and phase measurement system with network communication (Ethernet Web Service Protocol, EtherNet/IP or EtherCAT available). With 1% true accuracy, chamber-to-chamber matching and process repeatability can be established with confidence. Uniquely convenient form-factors enable retrofitting to match box outputs to facilitate direct plasma monitoring. Issues such as product scrap events, endpoint detection errors and unnecessary preventative maintenance can all be eliminated with this advanced VI probe technology.
Compatible with all QC connectors. Capable of being changed in the field, allowing the unit to be moved between chambers with different connectors if desired.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
Model Number | Power Limit | Voltage/Current Limit |
---|---|---|
02-0232-02 |
12 kW - Connector Dependant |
8.5 kVpk-pk / 9 ARMS |
N-Type |
10 kW |
8.5 kVpk-pk / 9 ARMS |
HN-type |
12 kW |
8.5 kVpk-pk / 9 ARMS |
7/16th |
12 kW |
8.5 kVpk-pk / 9 ARMS |
LC |
12 kW |
8.5 kVpk-pk / 9 ARMS |
This Octiv model is designed for post-match use – it can accept custom-made adaptors to the RF bus bars typically used on the output of match boxes
Model Number | Power Limit | Voltage/Current Limit |
---|---|---|
02-0307-01 |
12 kW - Connector Dependant |
8.5 kVpk-pk / 80 ARMS - Connector Dependent |
N-Type |
10 kW |
8.5 kVpk-pk / 13.3 ARMS |
HN-Type |
12 kW |
8.5 kVpk-pk / 16.4 ARMS |
7/16th |
12 kW |
8.5 kVpk-pk / 17.4 ARMS |
LC |
12 kW |
8.5 kVpk-pk / 21.1 ARMS |
Designed to be compatible with one of the standard match box output connectors, enabling the Octiv to take measurements between the match and the plasma.
Model Number | Power Limit | Voltage/Current Limit |
---|---|---|
02-0308-01 |
20 kW |
19.8 kVpk-pk / 120 ARMS |
02-0314-01 |
20 kW |
22.6 kVpk-pk / 120 ARMS |
Specialised models designed for High Power applications.
Model Number | Power Limit | Voltage/Current Limit |
---|---|---|
02-0352-01 |
30 kW |
19.8 kVpk-pk / 120 ARMS |
02-0306-01 |
90 kW |
33.9 kVpk-pk / 500 ARMS |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
Book your recalibration now to ensure 1% true accuracy on your chamber-chamber matching and process repeatability.