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Octiv Suite 2.0

The Octiv Suite 2.0 VI probe is the most advanced RF sensor on the market for in-line power and impedance measurement, with unrivaled accuracy and functionality. It is a non-intrusive, in-line sensor used to monitor all the parameters of RF power, break them down to their individual components and reconstruct the waveform of multiple fundamental frequencies simultaneously. This cutting edge system can also measure plasma parameters such as ion flux by using the RF electrode as a sensor. The Octiv Suite is truly in a class of its own when it comes to power delivery into a plasma reactor. It can be used as a stand-alone instrument with our state-of-the-art software or integrated directly with any software platform using one of our advanced communication protocols.

Key Features
Choice of 5 frequencies on a single sensor, measures multiple frequencies simultaneously.
Unrivalled accuracy into 50 Ω and non-50 Ω impedances through our advanced calibration methodology.
Sensor run-to-run repeatability (<0.1%) enables a true gauge of plasma process drift.
Single and multi-frequency voltage and current waveform display.
Ion flux monitoring capability provides a direct correlation with etch and deposition rates.
Fundamental-to-harmonic phase output, a key parameter for endpoint detection.
All available for pulsed-RF, in both time-resolved mode (1 microsecond resolution) and in pulse-trend mode.
Key Benefits
Equivalent performance to network analyser and oscilloscope combined, in-line at high power.
Advanced endpoint capabilities using plasma impedance and harmonic spectrum analysis.
Detect etch endpoints (<1% open area) with higher sensitivity than multivariate OES endpoint detectors.
Live output of ion flux, plasma density and electron temperature is possible (see Plato Probe).
Significant cost benefits through the enablement of fault detection and early intervention.
USB, Ethernet, EtherCAT and Serial communication protocols with easy-to-use APIs for integrations.
These Advanced applications can be achieved rapidly using the “Impedans Expert” software package and with assistance from Impedans applications team.
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Compatible with all QC connectors. Capable of being changed in the field, allowing the unit to be moved between chambers with different connectors if desired.

Model Number Power Limit (in 50 Ohms) Voltage/Current (@ 13.56 MHz) Limit

02-0322-02

12 kW

3 kV/20 A

17-0001-02 (N-Type Female)

17-0002-01 (N-Type Male)

4.6 kW

3.5 kV/ 13.3 A

17-0005-02 (HN Female)

17-0006-02 (HN Male)

7 kW

7 kV/16.4 A

17-0003-01 (7/16 Female)

17-0004-01 (7/16 Male)

7.75 kW

5.6 kV/17.3 A

17-0013-02 (LC Female)

17-0025-01 (LC Male)

11.6 kW

7 kV/21.1 A

This Octiv model is designed for post-match use – it can accept customer-made adaptors to the RF bus bars typically used on the output of match boxes

Model Number Power Limit Voltage/Current Limit

02-0312-01

12 kW

3 kV/80 A

Designed to be compatible with one of the standard match box output connectors, enabling the Octiv to take measurements between the match and the plasma.

Model Number Power Limit Voltage/Current Limit

02-0317-01

20 kW

7 kV/120 A

02-0315-01

20 kW

8 kV/120 A

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Specialised models designed for High Power applications.

Model Number Power Limit Voltage/Current Limit

02-0319-01

30 kW

7 kV/120 A

02-0321-01

90 kW

12 kV/500 A

Power, Voltage & Current Specifications
Power Dynamic Range
> 40 dB
Power Range
See model specifications
Power Resolution
0.25 W
Power Accuracy (95% confidence)
±1%
Voltage Dynamnic Range
80 dB
Voltage Range (Typical)
0.3 VRMS to 3000 VRMS, custom available
Voltage Resolution
0.1 VRMS
Voltage Accuracy (95% confidence)
±1%
Current Dynamic Range
80 dB
Current Range
2.5 mARMS to 20 ARMS, custom available
Current Resolution
2.5 mARMS
Current Accuracy (95% confidence)
±1%
General Specifications
Calibration Standard
NIST traceable [Power, Impedance]
Calibration Cycle
1 year to maintain quoted accuracy
Sensor Characteristic Impedance
50 Ohms as standard
RF Connectors
QC, EIA and custom options
RF Power Range @ 50 Ohms impedance
Standard: 12 kW typical (connector dependent)
High Power: 30 kW & 90 kW
Operating Temperature Range
10oC - 80oC, calibrated versus temperature
Sensor Power Requirements
15-24 V DC, 0.5 A
Communication Interfaces
Micro USB, RJ45 (x2)
Connectivity (Impedans Software)
USB 2.0, Ethernet
Communication Protocols (Standard)
USB 2.0, HTTP Web Service
Communication Protocols (OEM Options)
EtherCAT, EtherNet/IP, Serial, RS232
Parameter Report Rate (Standard)
USB: 2 ms
Ethernet: 100 ms
Sensor Pulse Synchronisation
External sync: TTL input
Internal sync: Software level trigger

Software Screenshots

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Smith Chart showing the characterisation of a match box.
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Meter View showing live monitoring of parameters.
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Harmonic profile and Waveform reconstruction of the Voltage and Current.
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Talk to Us Today

Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you