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RF Voltage-Current (VI) Probes
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The Octiv Suite 2.0 VI probe is the most advanced RF sensor on the market for in-line power and impedance measurement, with unrivaled accuracy and functionality. It is a non-intrusive, in-line sensor used to monitor all the parameters of RF power, break them down to their individual components and reconstruct the waveform of multiple fundamental frequencies simultaneously. This cutting edge system can also measure plasma parameters such as ion flux by using the RF electrode as a sensor. The Octiv Suite is truly in a class of its own when it comes to power delivery into a plasma reactor. It can be used as a stand-alone instrument with our state-of-the-art software or integrated directly with any software platform using one of our advanced communication protocols.
Compatible with all QC connectors. Capable of being changed in the field, allowing the unit to be moved between chambers with different connectors if desired.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0322-02 | 12 kW - Connector Dependant | 8.5 kVpk-pk / 9 ARMS |
N-Type | 10 kW | 4.2 kVpk-pk / 9 ARMS |
HN-Type | 12 kW | 8.5 kVpk-pk / 9 ARMS |
7/16th | 12 kW | 8.5 kVpk-pk / 9 ARMS |
LC | 12 kW | 8.5 kVpk-pk / 9 ARMS |
This Octiv model is designed for post-match use – it can accept custom-made adaptors to the RF bus bars typically used on the output of match boxes.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0312-01 | 12 kW - Connector Dependant | 8.5 kVpk-pk / 80 ARMS - Connector Dependent |
N-Type | 10 kW | 4.2 kVpk-pk / 13.3 ARMS |
HN-type | 12 kW | 8.5 kVpk-pk / 16.4 ARMS |
7/16th | 12 kW | 8.5 kVpk-pk / 17.3 ARMS |
LC | 12 kW | 8.5 kVpk-pk / 21.1 ARMS |
Designed to be compatible with one of the standard match box output connectors, enabling the Octiv to take measurements between the match and the plasma.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0317-01 | 20 kW | 19.8 kVpk-pk / 120 ARMS |
02-0315-01 | 20 kW | 22.6 kVpk-pk / 120 ARMS |
Specialised models designed for High Power applications.
Power and Current limits are Frequency dependant. Values given below assume the sensor is connected into a 50 Ohm load at 13.56 MHz. Voltage Limit is the peak-peak voltage while the Current limit is the RMS current. Rating is not dependant upon the connector chosen.
| Model Number | Power Limit | Voltage/Current Limit |
|---|---|---|
02-0319-01 | 30 kW | 19.8 kVpk-pk / 120 ARMS |
02-0321-01 | 90 kW | 33.9 kVpk-pk / 500 ARMS |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
Book your recalibration now to ensure 1% true accuracy on your chamber-chamber matching and process repeatability.
