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Impedans Semion 3 keV System
Semion 3 keV System

The Semion 3 keV System is a new Retarding Field Energy Analyser (RFEA) from Impedans Ltd which extends the range of the Semion sensor platform. It can measure the ion flux and ion energy distribution function (IEDF) in real time with up to 3 keV peak-peak RF bias voltage applied, three times what the standard Semion system can achieve. The sensor consists of a anodized aluminium wafer (as standard) with a single sensing element placed where the substrate would normally sit. The sensing element can have various current sensitivities depending on the expected plasma density, covering the full range of plasma applications. The Semion 3 keV System is the ideal sensor for rapid plasma characterization, based on the industry standard ion energy measurement platform, which has over 100 publications to date.

Key Features
Measure the Ion Flux and Ion Energy Distribution with energy range up to 3000 eV (process dependant).
Suitable for Grounded, Floating and RF Biased conditions.
Fully automated software analysis including IEDF adjustment for sensor DC bias potential.
Replaceable sensor elements with different sensitivities ranging from 0.001 A m-2 to 700 A m-2.
Sensor elements and holder available in anodised aluminium, bare aluminium or stainless-steel options.
Key Benefits
Portable system allowing analysis in multiple chamber using a single sensor.
Provides in-situ measurement of Ion Energy Distribution (IED) under plasma processing conditions.
Provides insight for fundamental research and for plasma model validation.
Generate process data for customer escalations or product marketing.
Correlate process performance with the key plasma process drivers (Ion Energy and Ion Flux).
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Electronics Box

The Semion Retarding Field Energy Analyser (RFEA), Electronics box is calibrated accurately for voltages ranging from -3000V to +3000V and currents ranging from 100 pA to 60 mA.

Model Number Product Name Description

02-0550-02

Semion 3 keV Electronics Unit

Compatible for all Semion 3 keV holders.

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Feed-through

The vacuum Feed-through transmits electrical signals by connecting the Electronics Box from Outside the Vacuum chamber to the Semion Sensor inside the vacuum chamber.

Model Number Product Name Description

02-0548-01

Semion 3 keV Semion Feedthrough

Compatible for all Semion 3 keV holders.

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Button Probes

The Button Probes of the sensor are designed to be replaceable in the field. Lifetime is typically 10 to 100 hours of plasma exposure, depending on chamber conditions. For use in deposition systems the sensing element will survive 10 microns of deposition before needing to be replaced.

Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.

Model Number Product Name Description

02-0369-01

Low Density

Ion Flux Range 0.001 to 3 Am-2

02-0366-01

Standard Density

Ion Flux Range 0.01 to 50 Am-2

02-0372-01

High Density

Ion Flux Range 0.1 to 700 Am-2

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Holders

The main purpose of the sensor holder is to hold the replaceable Button Probe sensors. It can withstand temperature up to 150°C without the need for cooling.

Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.

Model Number Product Name Description

02-0387-01

50 mm Holder

Model numbers for Anodised Aluminium as standard.

02-0396-01

70 mm Holder

1 sensing element

02-0405-01

100 mm Holder

1 sensing element

02-0417-01

150 mm Holder

1 sensing element

02-0429-01

200 mm Holder

1 sensing element

02-0441-01

300 mm Holder

1 sensing element

RFEA Probe Specifications
Number of sensors (Button Probes)
1
Probe configuration
4-grid
Button Probe diameter (sensing element)
33mm
Holder diameter
50 - 300 mm diameter options (custom available)
Holder thickness
5mm
Max. operating temperature
150°C
Button Probe material
Aluminium, anodised aluminium, stainless steel
Holder material
Aluminium, anodised aluminium, stainless steel
RFEA Probe cable length
650 mm (custom available)
Flange Type
CF40 as standard, KF40 and custom options available
CF40 as standard, KF40 and custom options available
Ion Energy Range
3000 eV (standard/low/high density Button Probe)
Ion Flux
0.001 to 3 Am-2 (low density Button Probe)
0.01 to 50 Am-2 (standard Button Probe)
0.1 to 700 Am-2 (high density Button Probe)
Pressure Range
≤ 300 mTorr
IEDF Resolution
±1 eV nominal
Ion Density Range
1012 to 1018 m-3 (Button Probe dependent)
Max. RF Bias Voltage (applied to probe)
3 kV*(peak to peak - @ 13.56 MHz)
Max. DC Bias Voltage
-1940 V
Bias Frequency Range
100 kHz to 80 MHz

Software Screenshots

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IEDF for Grounded scan in Argon.
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IEDF for -1200 Vdc 13.56 MHz bias.
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Time averaged data for 1 kHz pulsed source.
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