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Substrate Level Measurement
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The Quantum system is comprised of a retarding field energy analyser with integrated quartz crystal microbalance (QCM), used to measure the ion energy distribution function (IEDF) and the ion-neutral deposition ratio at a surface inside a plasma reactor. This system measures and displays deposition rates, IEDF, ion flux and the DC bias voltage at the surface on which the sensor is deployed. Using crystals coated with specified materials, the system can also measure etch rates of ions and neutrals. The system was designed to be mounted on electrically biased surfaces including radio-frequency (RF). A unique shielding structure allows accurate detection of the millivolt level, 6 MHz, crystal oscillation frequency in the presence of RF bias levels up to 900 V peak-to-peak. Unlike other QCM systems, no water cooling of the crystals is needed. A compensation crystal, mounted next to the measurement crystal, is not exposed to plasma particles and used to compensate for temperature effects on the oscillating frequency of the measurement.
The Quantum sensor, Electronics box is calibrated accurately for voltages ranging from -2000V to +2000V and currents ranging from 100 pA to 60 mA.
| Model Number | Product Name | Description |
|---|---|---|
02-0129-01 | Quantum Electronics Unit | Compatible for Quantum holders. |
The vacuum Feed-through transmits electrical signals by connecting the Electronics Box from Outside the Vacuum chamber to the Quantum Sensor inside the vacuum chamber.
| Model Number | Product Name | Description |
|---|---|---|
02-0130-02 | Quantum Feed-through | Compatible for Quantum holders. |
The Button Probes of the sensor are designed to be replaceable in the field. Lifetime is typically 10 to 100 hours of plasma exposure, depending on chamber conditions. For use in deposition systems the sensing element will survive 10 microns of deposition before needing to be replaced.
High Pressure Buttons, which extend the maximum pressure range to 1.5 Torr, are available upon request.
Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.
| Model Number | Density Range | Description |
|---|---|---|
02-0474-01 | Low Density | Ion Flux Range 0.001 to 3 Am-2 |
02-0133-01 | Standard Density | Ion Flux Range 0.01 to 50 Am-2 |
02-0477-01 | High Density | Ion Flux Range 0.1 to 700 Am-2 |
02-0134-01 | Calibration Button | Used as a temperature reference for the quartz crystal microbalance |
The main purpose of the sensor holder is to hold the replaceable Button Probe sensors. It can withstand temperature up to 100 °C without the need for cooling.
Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.
| Model Number | Holder Size | Description |
|---|---|---|
02-0132-01 | 100 mm Holder | 1 Measurement Button, 1 Calibration Button |
02-0131-01 | 300 mm Holder | 1 Measurement Button, 1 Calibration Button |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
