The Semion Retarding Field Energy Analyser (RFEA) system measures the ion flux and ion energy distribution function (IEDF) hitting a surface in real-time using an imitation substrate (holder plate) with integrated sensors. The Semion Multi Sensor system can have up to 13 sensing elements distributed around the imitation substrate, which is primarily used to investigate the uniformity of ion energy and ion flux at the substrate in industrial plasma applications. A range of replaceable sensing elements with different signal sensitivities are available to probe a wide range of plasma ion current densities. This is the industry standard for substrate level measurement of the ion energy distribution, used in over 100 publications for fundamental research and plasma process development.
The Semion Retarding Field Energy Analyser (RFEA), Electronics box is calibrated accurately for voltages ranging from -2000V to +2000V and currents ranging from 100 pA to 60 mA.
Model Number | Product Name | Desciption |
---|---|---|
02-0458-01
|
Semion Single Electronics Unit |
Compatible with single holders only. |
02-0459-01 |
Semion Multi Electronics Unit |
Compatible for all holders. |
The vacuum Feed-through transmits electrical signals by connecting the Electronics Box from Outside the Vacuum chamber to the Semion Sensor inside the vacuum chamber.
Model Number | Product Name | Description |
---|---|---|
02-0455-01 |
Single Single Feedthrough |
Compatible with single holders only. |
02-0456-01 |
Semion Multi Feedthrough |
Compatible for all holders. |
02-0545-01 |
Semion Single Time Resolved Feedthrough |
Compatible with fully grounded single holders only. |
02-0546-01 |
Semion Multi Time Resolved Feedthrough |
Compatible for all holders when fully grounded. |
The Button Probes of the sensor are designed to be replaceable in the field. Lifetime is typically 10 to 100 hours of plasma exposure, depending on chamber conditions. For use in deposition systems the sensing element will survive 10 microns of deposition before needing to be replaced.
High Pressure Buttons, which extend the maximum pressure range to 1.5 Torr, are available upon request
Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.
Model Number | Product Name | Description |
---|---|---|
02-0007-03 |
Low Density |
0.001 to 3 Am-2 |
02-0333-01 |
Standard Density |
0.01 to 50 Am-2 |
02-0336-01 |
High Density |
0.1 to 700 Am-2 |
The main purpose of the sensor holder is to hold the replaceable Button Probe sensors. It can withstand temperature up to 150°C without the need for cooling.
Anodised Aluminium as standard. Bare Aluminium and Stainless-Steel available upon request.
Model Number | Product Name | Description |
---|---|---|
02-0390-01 |
50 mm Single Holder |
Single Holders also available up to 300mm |
02-0399-01 |
70 mm Single Holder |
1 sensing element mounting holes available |
02-0423-01 |
150 mm Multi Holder |
7 sensing elements |
02-0435-01 |
200 mm Multi Holder |
9 sensing elements |
02-0447-01 |
300 mm Multi Holder |
13 sensing elements |
02-0450-01 |
450 mm Multi Holder |
13 sensing elements |
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you
Are you planning to do a plasma measurement project soon? Then you don’t want to run out of Button Probes in the middle of the experiment.