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App Note
Investigation of ion ejection from a mini-helicon thruster using a Semion retarding field energy analyzer
App Note
Characterization of SiO2 pattern transfer in an ALE process using the Semion RFEA
App Note
Ion energy and angular distributions measured in a planar Ar/O2 ICP using the Semion RFEA system
App Note
Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection
App Note
Determination of ion and neutral deposition rates using a quartz crystal microbalance and a gridded energy analyzer
App Note
Measurement of deposition rates and ion energy distributions using the Quantum System
App Note
Characterization of HiPIMS plasma via process compatible measurement probe