Thin film coatings are deposited on surfaces for a wide variety of applications including semiconductors, solar panels, food packaging and optical lenses, among many others. Vacuum coating can be broken down into two main types; physical vapour deposition (PVD) and chemical vapour deposition (CVD). PVD processes include magnetron sputtering, HiPIMS and pulsed laser deposition (PLD). CVD process are often enhanced using plasma i.e. PECVD.
Impedans offer a range of products suitable for monitoring your vacuum deposition plasma processing equipment. We have products suited for research and development work such as process development or new tool design. We also have products for live monitoring of process tools in the fab during production.
Do you want to learn more about our sensors or applications? Contact us and a member of the team will get back to you