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App Note
Measurement of deposition rates and ion energy distributions using the Quantum System
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App Note
Characterization of HiPIMS plasma via process compatible measurement probe
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App Note
Ion energy and ion flux measurements through high-aspect ratio holes using the Vertex system
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App Note
Ion velocity distribution measurement through high-aspect ratio holes using the Semion system
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App Note
Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma
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App Note
Impedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges
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App Note
Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges
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