Resources Library

Not sure what you’re looking for? Then browse by market sector.

App Note
Measurement of deposition rates and ion energy distributions using the Quantum System
App Note
Characterization of HiPIMS plasma via process compatible measurement probe
App Note
Ion energy and ion flux measurements through high-aspect ratio holes using the Vertex system
App Note
Ion velocity distribution measurement through high-aspect ratio holes using the Semion system
App Note
Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma
App Note
Impedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges
App Note
Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges