Categories Application Notes Fundamental Research Octiv Suite 2.0 Semion 2500 V4 Tool Characterization The magnetic asymmetry effect in geometrically asymmetric RF capacitively coupled plasmas, characterized with Impedans’ Octiv Suite 2.0 VI probe and Semion RFEA system Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Semion 2500 V4 The effect of driving frequency on the IVDF in a magnetron sputtering system using Impedans’ Semion RFEA System Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Vertex Ion angular distribution measurement with a planar retarding field analyzer Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Semion pDC Tool Characterization Experimental characterisation of a vacuum arc thruster using Impedans’ Semion Pulsed DC retarding field energy analyzer Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Semion 2500 V4 Ion flux and energy measurement using Impedans Semion system in silicon etching with a pulsed HBr/O2 plasma. Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Fundamental Research Langmuir Probe Experimental investigations on time resolved characteristics of pulsed inductively coupled O2 /Ar plasmas using Impedans Langmuir Probe. Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Fundamental Research Langmuir Probe Octiv Poly 2.0 Tool Characterization Application of Impedans Langmuir Probe and Octiv Poly in ICP argon discharge to study electron kinetics and spatial transport Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Fundamental Research Langmuir Probe Octiv Suite 2.0 AImpedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Fundamental Research Langmuir Probe Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Ion velocity distribution measurement through high-aspect ratio holes using the Semion system Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Vertex Ion energy and ion flux measurements through high-aspect ratio holes using the Vertex system Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Quantum Measurement of deposition rates and ion energy distributions using the Quantum System Post author By Sean Mulcahy Post date October 20, 2022
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