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Application Notes Semion pDC Tool Characterization

Experimental characterisation of a vacuum arc thruster using Impedans’ Semion Pulsed DC retarding field energy analyzer

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Application Notes Process Performance Semion 2500 V4

Impedans Semion RFEA System is used in Silicon etching in a pulsed HBr/O2 plasma – Ion flux and energy analysis

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Application Notes Fundamental Research Langmuir Probe

Experimental investigations on time resolved characteristics of pulsed inductively coupled O2 /Ar plasmas using Impedans Langmuir Probe.

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Application Notes Fundamental Research Langmuir Probe Octiv Poly 2.0 Tool Characterization

Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges

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Application Notes Fundamental Research Langmuir Probe Octiv Suite 2.0

Impedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges

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Application Notes Fundamental Research Langmuir Probe

Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma

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Application Notes Process Performance

Ion velocity distribution measurement through high-aspect ratio holes using the Semion system

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Application Notes Process Performance Vertex

Ion energy and ion flux measurements through high-aspect ratio holes using the Vertex system

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Application Notes Process Performance Quantum

Measurement of deposition rates and ion energy distributions using the Quantum System

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Application Notes

Determination of ion and neutral deposition rates using a quartz crystal microbalance and a gridded energy analyzer

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Application Notes Moduli RF Spectrometer Octiv Poly 2.0 Octiv Suite 2.0 Process End Point Detection

Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection

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Application Notes Model Validation Semion 2500 V4

Ion energy and angular distributions measured in a planar Ar/O2 ICP using the Semion RFEA system