Categories Application Notes Determination of ion and neutral deposition rates using a quartz crystal microbalance and a gridded energy analyzer Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Moduli RF Spectrometer Octiv Poly 2.0 Octiv Suite 2.0 Process End Point Detection Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Model Validation Semion 2500 V4 Ion energy and angular distributions measured in a planar Ar/O2 ICP using the Semion RFEA system Post author By Sean Mulcahy Post date October 20, 2022
Categories Application Notes Process Performance Semion 2500 V4 Tool Characterization Characterization of SiO2 pattern transfer in an ALE process using the Semion RFEA Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Semion 2500 V4 Tool Characterization Investigation of ion ejection from a mini-helicon thruster using a Semion retarding field energy analyzer Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Semion 2500 V4 Tool Characterization Study of the effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Process Performance Semion 2500 V4 Study of form Ti–Cu thin films with regard to controlling the copper release Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Suite 2.0 Continuous-Wave RF Plasma Polymerisation of Furfuryl Methacrylate (FMA) Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Poly 2.0 Investigation of the deposition rate of organophosphate thin films using Octiv VI Probe. Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Poly 2.0 virtual metrology Octiv VI probe used to measure the RF characteristics of a commercial CCP reactor Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Poly 2.0 Tool Characterization Study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Octiv Suite 2.0 Ion flux as an alternative deposition rate parameter Post author By Sean Mulcahy Post date October 5, 2022
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